It is my pleasure to inform that VPHA
's article on the recommended reading list of early ALD publications has been published online in the Journal of Vacuum Science and Technology A
(JVSTA), in the special ALD issue of January 2017
- Title: Recommended reading list of early
publications on atomic layer deposition—Outcome of the “Virtual Project on the
History of ALD”
- Authors (62 in total, alphabetical order): Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael
Bechelany, Maria Berdova, Stefan Boyadjiev, David C. Cameron, Rong Chen,
Mikhail Chubarov, Veronique Cremers, Anjana Devi, Viktor Drozd, Liliya
Elnikova, Gloria Gottardi, Kestutis Grigoras, Dennis M. Hausmann, Cheol Seong
Hwang, Shih-Hui Jen, Tanja Kallio, Jaana Kanervo, Ivan Khmelnitskiy, Do Han
Kim, Lev Klibanov, Yury Koshtyal, A. Outi I. Krause, Jakob Kuhs, Irina
Kärkkänen, Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Adam A.
Łapicki, Markku Leskelä, Harri Lipsanen, Jussi Lyytinen, Anatoly Malkov,
Anatoly Malygin, Abdelkader Mennad, Christian Militzer, Jyrki Molarius,
Małgorzata Norek, Çağla Özgit-Akgün, Mikhail Panov, Henrik Pedersen, Fabien
Piallat, Georgi Popov, Riikka L. Puurunen, Geert Rampelberg, Robin H. A. Ras,
Erwan Rauwel, Fred Roozeboom, Timo Sajavaara, Hossein Salami, Hele Savin,
Nathanaelle Schneider, Thomas E. Seidel, Jonas Sundqvist, Dmitry B. Suyatin,
Tobias Törndahl, J. Ruud van Ommen, Claudia Wiemer, Oili M. E. Ylivaara, Oksana
- Citation: Journal of Vacuum Science and Technology A 35 (2017) 010801 (13 pages).
- Link: http://dx.doi.org/10.1116/1.4971389.
The main content of the article is the recommended reading list of 22 early ALD publications, created through open voting
among the VPHA participants. For each publication, the reference list contains the full author list and the title in English, translated from the original language when necessary. The usual practice of JVSTA would have been to shorten the author list to "et al." from a certain number of author and NOT include the titles; we are grateful for the JVSTA editors for making exceptions and allowing us to expand the article for a complete historical record (you can find our article correspondence here
). The article's Introduction contains a description of how VPHA started and notations on some ALD history activities preceeding it.
Hopefully, this article will stimulate people to read some of the original early ALD publications. VPHA is still open for new volunteers to join and to share comments on early ALD publications in the ALD-history-evolving-file
--- >300 did not make it to the shortlist of the article. If you would like to volunteer, please contact us through info@ vph-ald.com (delete the space).
Many people have helped VPHA to progress in some way. While we have tried to declare all major contributions in the (longish) Acknowledgement, in addition to those mentioned, numerous people have helped VPHA to progress in various ways. We are grateful for everyone's help, big and small, in the past and in the future: all of it matters.
The article is published with Open Access (license: CC BY 4.0
) and can be freely used e.g. for teaching. The abstract and acknowledgements from the article are copied below for easy reference.