VPHA communication: JVSTA manuscript authorship double-checking

The email below was sent to 71 VPHA co-authors. 

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Dear VPHA co-authors,

We have started the preparations for the JVSTA special ALD issue article. As agreed earlier, all those who participated in the VPHA voting in June, will be co-authors. (A bit less than half of all VPHA co-authors participated in the VPHA voting.)

It has been manual work to pick out persons for the author list, and there is a chance for human error in this procedure. With this email, I would like to double-check that the author list of the JVSTA article is as it should be.  

VPHA communication: 3rd commenting round to start / DL Sept 23

The email below was sent to 71 current and 35 prospective VPHA co-authors. 

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Dear VPHA co-authors and prospective co-authors,

The VPHA reading is now 68% completed. To get closer to 100%, we have been preparing for a third round of reading. We are finished with selecting papers to read, and distribution of papers will soon start.

As earlier, our goal is to have each early ALD publication red and commented upon by minimum three people. Commenting is done in the ALD-history-evolving-file and bookkeeping in VPHA-reading-overview-file. The number of papers chosen per person varies and is in maximum five. You can view in VPHA-author-info-update file (2^nd tab, “reading-distribution3”), which files have been selected for you.

Twitter: ALD 2017 conference account added to the ALD Glossary

The ALD Glossary page of ALD History Blog has been updated with info of the new Twitter account related to next year's ALD 2017 conference in Denver, Colorado, USA.

ALD conference Twitter accounts: 

• ALD 2014: @ALD_2014
• ALD 2016: @ALD2016_Ireland
• ALD 2017: @AvsALD 

More on #ALDep and Twitter:

• Advice for new Twitter users in a separate post here. 
• Most recent Twitter news is that anyone can ask to verify your account - this feature has earlier been open on invitation only. I have today asked to verify mine - let's see what the answer will be.

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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust

ALD history reading, once more

We are about to start the third and probably final reading-distribution round in VPHA of early ALD publications. New volunteers are still warmly welcome to join and contribute to the work - at the moment we are with 71 volunteers from 20 countries in 3 continents. Our latest scientific joint outcome was the poster presentation at the ALD 2016 conference.

Would you like to join the VPHA reading, please send an email to info@ vph-ald.com (delete the space) letting us know of your interest and tell us:

• your name & affiliation, 
• email address, 
• languages in which you can read and comment (English + other?),
• your ALD-related speciality.

We collect this info in the VPHA-author-info-update file, 2nd tab, where we also pair people and papers, before distributing papers for reading. Let us agree that we will wait until August 26 to allow new people to join, before we start distributing papers. 

More on the topic:

Beneq Blog on the history of ALD-based electroluminescent displays

Beneq has published a blog post where they very nicely review the history of electoluminescent (EL) flat panel display fabrication. EL flat panel displays were the first large-scale industrial application of ALD; production started in the 1980s and still continues in Olarinluoma, Espoo, Finland. Some process details are also shared in the blog post. At the end of the post, one can request a copy of the interesting presentation of Sami Sneck at the ALD 2016 conference.

Link to Beneq blog: http://beneq.com/blog/201608/ald-in-extreme-conditions.html

More on the topic:

• "A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy" by R. L. Puurunen, Chemical Vapor Deposition, Vol 20, Year 2014, pages 332-344. http://onlinelibrary.wiley.com/doi/10.1002/cvde.201402012/abstract  (open access)

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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust

VPHA status update 15.8.2016

The VPHA status update below was sent by email to 71 VPHA co-authors and 31 prospective co-authors. More volunteers are still welcome to join the VPHA reading & commenting effort. 

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 Dear VPHA co-authors and prospective co-authors,

Much has happened regarding the understanding of the early history of ALD in the last two months since the previous general VPHA status update on May 16 --- you can access earlier VPHA status updates here. We are now starting active preparations for the next steps, so it is a good time to review the progress made so far.

Below, you find and update on the following topics:

• VPHA poster at ALD 2016, with results of VPHA voting
• Next step: VPHA reading, 3rd commenting round to come
• Next step: Letter/article to JVSTA special issue (DL September 6)
• Invited plenary talk by Prof. Anatoly Malygin at ALD 2016
• ALD Innovation Prize at ALD 2016 to Dr. Suvi Haukka, ASM, Finland
• Recent ALD-related advances in Wikipedia (#WikiALD)
• About an increased Twitter activity related to (#ALDep)
• VPHA ALD thesis list with >300 entries, many missing still?
• New in ALD History Blog: ALD Glossary
• Other ALD History Blog posts

ALD Innovation Prize to Dr. Suvi Haukka, ASM

Last updated 14.9.2016

Dr. Suvi Haukka, executive scientist at ASM, located Finland, was awarded the ALD Innovation prize at the ALD 2016 Ireland conference. In general the prize, awarded since 2011, is given "For innovative research in ALD and Service to the ALD community". Conference chair(s) choose the receiver of the prize. Personal justification for Dr. Suvi Haukka was described by Prof. Gregory Parsons, last year's awardee as: "For pioneering studies of ALD surface chemistry and for advocating the importance of fundamental understanding for ALD industrial scaling". 

Prof. Greg Parsons handing Dr. Suvi Haukka the ALD innovation prize. Photo by Riikka Puurunen.

Dr. Suvi Haukka has had a lifetime career in Atomic Layer Deposition (ALD). She started at Microchemistry Ltd. with Dr. Tuomo Suntola in 1990 and has since then advanced the science and technology of ALD worldwide. Since the Dutch ASM International bought Microchemistry in 1999, Suvi Haukka has been in key role at ASM in bringing ALD as a standard means of manufacturing in the semiconductor industry. A major milestone was the adoption of ALD by Intel in CMOS transistor gate dielectrics in 2007. Today, ALD equipment manufacturing is multi-USD100M business yearly. Dr. Suvi Haukka holds over 100 patents related to ALD.