ECS meeting invited ALD history talk: slides and proceedings

In October 2018, I had the honor to give an invited talk at the Electrochemical Society (ECS) fall meeting, organized in Cancun, Mexico (AiMES2018). ECS has had an ALD session since early 2000s. For me, this was the first time to attend the event: I got a very nice impression of the ALD session specifically and on this massive meeting in general.

The talk was called "Learnings from an Open Science Effort: Virtual Project on the History of ALD". Abstract is as follows:

"This work summarizes learnings from an Open Science effort “Virtual project on the History of ALD” (VPHA), started in 2013 to clarify the early history of atomic layer deposition (ALD). ALD is a multi-tool of nanotechnology and has been e.g. enabler of the continuation of Moore’s law of transistor scaling. ALD has been developed historically through two independent routes: atomic layer epitaxy (ALE) and molecular layering (ML). Especially the details on ML have remained little known to a broader audience. In this contribution, learnings in VPHA are seen from the viewpoint of its voluntary coordinator (the author self) related to historical details of ALD as well as from an organizational viewpoint and some other viewpoints. Selected details related to ALD’s history not fully accurately described in three earlier review articles are pointed out. The work made in VPHA has resulted in journal articles, presentations and an exhibition, and VPHA has in part provided the foundation for granting the 2018 Millennium Technology Prize to Dr. Tuomo Suntola. At the time of writing this contribution, in July 2018, VPHA is still on-going, and more volunteers are welcome to join the effort."

The slides are available through ECSarXiv: https://ecsarxiv.org/u6vw7/ (DOI: 10.1149/osf.io/u6vw7).

VPHA website updated with ECS Transactions article info

The VPHA website, http://vph-ald.com, has been on July 28, 2018 updated with info of the ECS Transactions article in press:

• Proceedings: R. L. Puurunen, "Learnings from an Open Science Effort: Virtual Project on the History of ALD", ECS Transactions, in press (2018). Open access preprint, DOI: 10.1149/osf.io/exyv3.

As the international ALD 2018 conference in Korea starts on July 29, 2018, it is good to spread the message that VPHA is still on-going and more volunteers are welcome to join. As communicated in the VPHA status update in May 2018, the plan is to produce jointly one more brief concluding review article from within VPHA. (Previous publications are listed in the Publication Plan here; the review now in question belongs to Item 10.) The articles produced earlier from within VPHA have become impactful within the field of ALD what comes to citations and other attention (see e.g. Altmetrics for the "ALE essay"). The last review is expected to be impactful, too.

VPHA status update 22.7.2018 - ECS Transactions info

The message below was sent to 76 VPHA contributors and 56 prospective contributors.

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From: Puurunen Riikka
Sent: 22 July 2018 22:31
To: info @ vph-ald.com
Cc: Puurunen Riikka; jonas.sundqvist@ <>
Subject: VPHA status update 22.7.2018 - ECS Transactions info

Dear current and prospective VPHA contributors,

This VPHA update shares information on an ECS Transactions article related to an invited talk at the ECS fall symposium. The previous VPHA status update was sent on May 28, 2018. All VPHA status updates published in the ALD History Blog can be viewed in this link.

Best regards,

Riikka Puurunen, voluntary VPHA coordinator

VPHA status update 28.5.2018 - 2018 Millennium Technology Prize and VPHA's next steps

The message below was sent to 76 VPHA contributors and 54 prospective contributors.  

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From: Puurunen Riikka
Sent: 28. toukokuuta 2018 16:31
To: info vph-ald.com
Cc: Puurunen Riikka <>; Jonas Sundqvist <>
Subject: VPHA status update 28.5.2018 - 2018 Millennium Technology Prize and VPHA's next steps

Dear VPHA contributors and prospective contributors,

This is the first status update of the Virtual Project on the History of ALD (VPHA) in year 2018 - earlier updates can be found in this link.

This update shares information on the following topics:

* The 2018 Millennium Technology Prize to Dr. Tuomo Suntola

* Words of thank to the community by Dr. Tuomo Suntola

* Puurunen’s invited talk at the ECS fall 2018 ALD symposium

* VPHA’s next step

With best regards,

Riikka Puurunen, VPHA’s voluntary coordinator