List of ALD conferences

File initiated 30.11.2015. Information updated on regular basis; do check the original conference websites for up-to-date information.  

All conferences and workshops can be listed, where ALD has been the main topic (>50% emphasis). Newest first. To request to add a conference to the list, please leave the details in the Comment field below, or send the info to Riikka Puurunen by email, at "firstname.lastname@vtt.fi"

Upcoming ALD conferences and workshops

2018

• ALD 2018, 18th International Conference on Atomic Layer Deposition , Korea. Chair: Jin-Seong Park; co-chair, dates and location to be announced.  
• Area-selective deposition workshop, ASD 2018. Raleigh North Carolina USA, March/April 2018, Chair: Gregory Parsons. Record of announcement: https://twitter.com/ErwinKessels/status/855472700168470530. 

 

2017

• AVS64, 64th International Symposium & Exhibition, Tampa, Florida, USA, Oct 29 - Nov 3, 2017. http://www.avs.org/Symposium/Call-For-Abstracts. Abstract DL May 1, 2017.
• E-MRS 2017, Warsaw Poland, 18-21 September 2017. http://www.european-mrs.com/synchrotron-radiation-and-atomic-layer-deposition-advanced-materials-emrs. Abstract DL: May 29, 2017.
• ALD Russia 2017, 2nd International Workshop "Atomic Layer Deposition: Russia - 2017", Sept 24-30, 2017, St. Petersburg, Russia. http://onlinereg.ru/ALD2017. Abstract DL: May 1.   
• ALD 2017, 17th International Conference on Atomic Layer Deposition  -Featuring the Atomic Layer Etching Workshop - July 15-18, 2017, Denver, Colorado, USA. www.ald-avs.org. Details will be posted to the ALD 2017 Website in November 2016. Abstract DL: February 17, 2017. Twitter: @AvsAld.
• Joint EuroCVD21- Baltic ALD 15, Linköping, Sweden, June 11-14, 2017. http://eurocvd-balticald2017.se/. Chair: Henrik Pedersen. Abstract submission opens: 10 November 2016; abstract submission deadline: 20 January 2017. 

Past ALD conferences and workshops

--- The old conferences are currently not updated here: the list has moved to a Google docs spreadsheet for easier editing: https://docs.google.com/spreadsheets/d/1GG09utLpOCuq97DUPNeO4YqKb_ID0gzNtJs7IJv5-wc/edit

2017

• 2nd Area Selective Deposition workshop ASD 2017, April 20-21, 2017, Eindhoven, The Netherlands. Abstract DL: Feb 21, 2017. http://www.nanomanufacturing.nl/ASD2017/ 
• Novel High-k Application Workshop on March 9th and 10th, 2017, Dresden, Germany. http://www.blog.baldengineering.com/2017/01/the-namlab-novel-high-k-application.html  
• Workshop on hybrid materials by ALD/MLD & Iberian ALD, http://www.nanogune.eu/event/ald-workshop-hybrid-materials. January 23-25, 2017, Donostia-San Sebastian, Spain. Chairs: Prof. Mato Knez, Dr. Mercedes Vila Juárez. HERALD collaboration. Abstract submission DL: Nov 20, 2016. 
• ALD workshop "ALD for industry" by European Society on Thin Films (EFDS), http://www.efds.org/appointments-detail/events/ald-workshop-ald-for-industry.html, Jan 17-18, 2017, Dresden, Germany. Chairs: Jonas Sundqvist and Christoph Hossbach. Twitter: #ALD4industry BALDengineering report

2016

• RAFALD Le Workshop du Réseau des Acteurs Francais de l'ALD 14-16 Novembre 2016 Paris. https://sites.google.com/site/rafaldepot/. 
• AVS 63rd International Symposium & Exhibition, November 6-11, 2016, Nashville, Tennessee. (Several sessions dedicated on ALD.) https://www.avs.org/Symposium. Travel report: http://aldhistory.blogspot.fi/2016/11/travel-notes-63rd-avs-symposium.html.
• Atomic layer deposition for two-dimensional materials (ALDfor2D) workshop, October 31, 2016, Eindhoven, The Netherlands. http://nanomanufacturing.nl/2DWorkshop/. HERALD collaboration. 
• 5th ALD symposium at SEMICON Europa, October 25, 2016, Grenoble, France. Organizer: ALD Lab Dresden, Johann W. Bartha http://www.semiconeuropa.org/ald-lab; http://www.blog.baldengineering.com/2016/10/final-agenda-ald-symposium-at-semicon.html. Review of ALD symposium: http://www.ald-lab-saxony.de/review-of-ald-symposium-at-semicon-europa-25-october-2016/
• 3rd International Conference on ALD Applications & 2016 China ALD Conference, October 16-19, SuZhou, China. http://www.c-ald.com/ Chairs: Prof. Shi-Jin Ding and Prof. Yongfeng Mei, both from Fudan University. Abstract submission deadline: August 31, 2016. Some pictures: http://www.blog.baldengineering.com/2016/10/pictures-from-china-ald.html. HERALD report: http://www.european-ald.net/news/3rd-international-conference-ald-applications-2016-china-ald-conference-0 
• The 14th International Baltic Conference on Atomic Layer Deposition, October 2-4, St. Petersburg, Russia. http://www.bald2016.ru/. Abstract DL (original: June 15, postponed): June 25, 2016. Travel report: http://aldhistory.blogspot.fi/2016/10/balticald2016-stpetersburg-travel-notes-puurunen.html.
• "G 03 - Atomic Layer Deposition Applications 12" session at the
  PRiME 2016/230th ECS Meeting, October 2-7, 2016, Honolulu, Hawaii. Link: https://ecs.confex.com/ecs/230/cfp.cgi. Abstract DL Friday, 15 April 2016.
• ALD 2016, 16th International Conference on Atomic Layer Deposition, Dublin, Ireland, July  24-27, 2016. http://ald2016.com/. HERALD collaboration. Chairs: Simon Elliott and Jonas Sundqvist. 
• Inera conference 2016, Vapor Phase Technologies for metal oxide and carbon nanostructures, July 5-9, 2016, Velingrad, Bulgaria. http://inera2016.issp.bas.bg/ Chair: Alexander G. Petrov.
• Synchrotron radiation to study atomic layer deposition, Barcelona, Spain, Jun 13-15, 2016. https://indico.cells.es/indico/event/63/. HERALD collaboration. Organizers: Massimo Tallarida, Jolien Dendooven. Abstract DL (original: April 4, 2016; postponed): April 22, 2016. 
• HERALD WG2 workshop, at the same time Annual Seminar of Finnish Centre of Excellence in Atomic Layer Deposition (ALDCoE), Helsinki, Finland, May 23-24, 2016. http://www.aldcoe.fi/herald/index.html HERALD collaboration. Chair: Markku Leskelä. 
• ALD for Novel Sensors and Biosensors Workshop. May 11-12, 2016, Magurele, Romania. http://www.infim.ro/events/ald-novel-sensors-and-biosensors-workshop. HERALD collaboration. 
• "ASD 2016", Area selective deposition workshop - ASD 2016, April 15, IMEC, Leuven, Belgium. http://www2.imec.be/be_en//education/conferences/asd-workshop-2016.html. HERALD collaboration. 
• Dedicated workshop on ALD for BEOL Applications in an extended metallization session during the Materials for Advanced Metallization MAM 2016 conference. Brussels, Belgium, March 20-23, 2016. http://www.mamconference.org/index.php HERALD collaboration. Co-chairs: Christopher J. Wilson, Christophe Detavernier
• Novel high k application workshop, by NaMLab, March 14-15, 2016, Dresden, Germany.  http://www.namlab.com/news/events-1/novel-high-k-application-workshop HERALD collaboration. Chair: Uwe Schroeder. 

2015

• (2015 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
• 1er Workshop Reseau des Acteurs Francais de'l ALD, RAFALD, November 16-18, Minatec et Campus Est Grenoble, France. https://sites.google.com/site/rafaldepot/rafald-2015. 
• Symposium of the ALD-Lab: Workshop on Atomic Layer Processing, Dresden, Germany,October 6, 2015 (at SEMICON Europa 2015). Link. Chairs: Johan W. Bartha, Jonas Sundqvist.
• Annual meeting of the COST project HERALD (http://www.cost.eu/COST_Actions/mpns/Actions/MP1402), Tartu, Estonia, September 30, 2015. http://www.bald2015.ee/herald-day/. Leader: Simon Elliott.
• Baltic ALD 2015, 13th International Baltic Conference on Atomic Layer Deposition, Tartu, Estonia, September 28-29, 2015. http://www.bald2015.ee/. Chairs: Jaan Aarik and Kaupo Kukli.
• ALD Russia 2015, International workshop Atomic Layer Deposition Russia 2015, Moscow-Dolgoprudny, Russia, September 21-23, 2015. http://ald-conf.ru/. Chair: Anatoly Malygin. Local organizers: Andrey Markeev, Andrey Zenkevich. Records: travel report by Puurunen. 
• Workshop - ALD for Batteries, Ghent, Belgium, September 15-16, 2015. http://www.cocoon.ugent.be/workshop-batteries. <Organizer? > 
• ALD 2015, 15th International Conference on Atomic Layer Deposition, Portland, Oregon, USA, July 1-2, 2015.  http://www2.avs.org/conferences/ALD/2015/index.html. Chairs: Charles Winter, Dae-Gyu Park.
• Nanomanufacturing: ALD FUNdamentals, Eindhoven, The Netherlands, June 8-9, 2015. http://www.nanomanufacturing.nl/. Workshop leader: Erwin Kessels.
• 3rd Annual Seminar of Finnish Centre of Excellence in Atomic Layer Deposition (ALDCoE), Helsinki, Finland, March 19, 2015. http://kemianseurat.fi/kemia/kp2015/. Chair: Markku Leskelä.

2014

• The 2nd International Conference on ALD Applications & 3rd China ALD conference, Shanghai, China, October 16-17, 2014. http://www.c-ald.org/ald/index.html. Chairs: Shi-Jin Ding, Yongfeng Mei.
• Symposium of the ALD Lab Dresden 2014, October 7, 2014 at SEMICON Europa 2014 in Grenoble, France. Link. Chairs: Johan W. Bartha, Jonas Sundqvist.
• (2014 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
• ALD 2014, 14th International Conference on Atomic Layer Deposition, Kyoto, Japan, 15-18 June, 2014. http://www.ald2014.org/. Chairs: Yukihiro Shimogaki and Christian Dussarrat. Records: Abstract book, CD/DVD proceedings. 
• Baltic ALD 2014, 12th International Baltic Conference on Atomic Layer Deposition, Helsinki, Finland, May 12-13, 2014.  Annual seminar of Finnish CoE in ALD. http://www.aldcoe.fi/bald2014/. Chair: Markku Leskelä.

2013

• Atomic Layer Deposition Symposium of the ALD Lab Dresden, Dresden, Germany, October 8, 2013 (at SEMICON Europa 2013). Link. Chairs: Johan W. Bartha, Jonas Sundqvist.
• (2013 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
• ALD 2013, 13th International Conference on Atomic Layer Deposition, San Diego, California, USA, July 28-31, 2013. http://www2.avs.org/conferences/ALD/2013/index.html. Chairs:  Jiyoung Kim, Paul Ma. Records: Abstract book, CD/DVD proceedings.
• Finnish Symposium on ALD by the ALDCoE (with Kemianpäivät), Helsinki, Finland, May 21, 2013. Chair: Markku Leskelä.

2012

• 1st International Conference on ALD Applications and 2nd China ALD Conference, Shanghai, China, October 15-16, 2012. Chairs: David Wei Zhang, Wei-Min Li. Report: Picosun press release. 
• (2012 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
• Symposium of the ALD Lab Dresden 2012, October 9, 2012 at SEMICON Europa 2012 in Dresden. Link. Chairs: Johan W. Bartha, Jonas Sundqvist. 
• Joint AVS-ALD & BALD 2012, 12th International Conference on Atomic Layer Deposition, Dresden, Germany, June 17-20, 2012. http://ald2012.namlab.com/. Chairs: Uwe Schröder, Mato Knez. Records: Abstract book, CD/DVD proceedings.

2011

• (2011 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
• ALD 2011, 11th International Conference on Atomic Layer Deposition, Cambridge, Massachuchetts, USA, June 26-29, 2011. http://www2.avs.org/conferences/ald/2011/index.html. Chairs: Jill Becker, Gary Rubloff. Records: Abstract book, CD/DVD proceedings. 

2010

• 1st ALD Scientific Meeting 2010 China. Chair: Wei Zhang. Report: Picosun press release.
• (2010 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
• (ALD 2010) Seoul, Korea. Chairs: Cheol Seong Hwang, Cha Young Yoo. Records: Abstract book, CD/DVD proceedings. 
• (Joint Baltic ALD / GerALD Conference 2010), Hamburg, Germany. <more info needed>

2009

• (Baltic ALD 2009) Uppsala, Sweden. 
• (2009 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
• ALD 2009, 9th International Conference on Atomic Layer Deposition, Monterey, California, USA, July 19-22, 2009. Chairs: Jeffrey Elam, Ana Londergan. Records: Abstract book, CD/DVD proceedings. 

2008

• (2008 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
• ALD 2008, 8th International Conference on Atomic Layer Deposition, Bruges, Belgium, June 29 - July 2, 2008. http://www.phys.tue.nl/ALD2008/. Chairs: Erwin Kessels, Annelies Delabie. Records: Abstract book, CD/DVD proceedings. 

2007

• (Joint E-MRS + Baltic ALD) Warsaw, Poland, 2007. 
• (2007 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
• ALD 2007, 7th International Conference on Atomic Layer Deposition, San Diego, California, USA, June 24-27, 2007. Chairs: Yves Chabal, Glen Wilk. Records: Abstract book, CD/DVD proceedings. 

2006

• (Baltic ALD 2006) Oslo, Norway. 
• (2006 ECS) The ALD conference at ECS started in fall of 2005 and has run annually since then in the fall period
• (ALD 2006) Seoul, Korea. Chair: Hyungjun Kim, Shi-Woo Rhee. Records: Abstract book, CD/DVD proceedings. 

2005

• ECS 208th Meeting - Los Angeles, California, USA, October 16-21, 2005. Symposium under "Dielectric Science and Technology/Electronics": Atomic Layer Deposition Applications: Challenges and Opportunities. http://www.electrochem.org/meetings/biannual/208/symposium_topics.htm Organizers: A.R. Londergan et al. 
• ALD 2005, AVS 5th International Conference on Atomic Layer Deposition, San Jose, California, USA, August 8-10, 2005. Chair: Roy Gordon. Records: Abstract book, CD/DVD proceedings. 

2004

• ALD 2004, A joint American Vacuum Society ALD and Baltic ALD conference Celebrating 30 years of ALD, Helsinki, Finland, August 16-18, 2014. http://www.helsinki.fi/ALD2004/. Chair: Mikko Ritala.  Records: Abstract book, CD/DVD proceedings. 

2003

• ALD '03, Atomic Layer Deposition 2003, San Jose, California, USA, August 4-6, 2013. Chair: Gregory Parsons. Records: Abstract book, CD/DVD proceedings. 

2002

• (BALD-5,) Tartu, Estonia, ____, 2002. ___ 
• (ALD 2002) Seoul, Korea. Chair: Hyeongtag Jeon. Records: Abstract book, CD/DVD proceedings. 

2001

• (ALD 2001) Monterey, California, USA. Chair: Steven George. Records: Abstract book, CD/DVD proceedings. 

1990s

• ( 1999 ALENET, Helsinki ___)
• BaltALE-4, The Fourth Baltic Symposium on Atomic Layer Epitaxy, Tartu, Estonia, October 10-11, 1997. Chair: Arnold Rosental, co-chair: Lauri Niinistö. Records: Book of abstracts (ISBN 9985-60-401-6, (c) Institute of Physics, Tartu). 
• (1996, ALE-4, Linz, Austria) Chair: Helmut Sitter. Records: Proceedings of the 4th International Symposium on Atomic Layer Epitaxy, Linz, Austria, 1996 (Ed. H. Sitter and H. Heinrich), Appl. Surf. Sci. 112 (1997).
• (1995) Baltic ALE symposium, Helsinki, Finland. <dates, chair?, records>
• (1994, ALE-4, Sendai, Japan) Chair: Jun-ichi Nishizawa. Records: Proceedings of the 3rd International Symposium on Atomic Layer Epitaxy, Sendai, Japan, 1994 (Eds. M. Ozeki, A. Usui, Y. Aoyagi, Y. and J. Nishizawa), Appl. Surf. Sci. 82/83 (1994).
• TKK - TÜ 2. ALE Sümpoosium, 2. ALE Symposiumi, 2nd ALE Symposium, Tartu, Estonia, October 7-8, 1993. Records: Programme and abstracts (programm ja teesid), ISBN 9985-56-008-6, Edited by: J. Aarik and A. Jaek.
• (1992, ALE-2, Raleigh, NC) Chair: Salah Bedair. Records: Proceedings of the 2nd International Symposium on Atomic Layer Epitaxy, Raleigh, North Carolina, 1992, (Ed. S. M. Bedair), Thin Solid Films 225 (1993).
• (1991, Baltic ALD) Helsinki University of Technology - Tartu University ALE Symposium, Sjökulla/Espoo, Finland. <incomplete info>
• ALE-1, 1st International Symposium on Atomic Layer Epitaxy, Espoo, Finland, Jun 11-13, 1990. Chair: Lauri Niinistö. Records: Proceedings of the 1st International Symposium on Atomic Layer Epitaxy (Ed. L. Niinistö), Acta Polytechnica Scandinavica, Chemical Technology and Metallurgy Series No. 195 (1990), 209 pages.

1980s

• VTT Symposium 54, First symposium on Atomic Layer Epitaxy, Espoo, Finland, December 13-14, 1984. Record: Proceedings, Ed. Riitta Paananen (copy can be obtained from VTT).  

1970s

1960s