Photos from HERALD WG2 / ALDCoE Helsinki workshop

We had a very fine HERALD/ALDCoE workshop in Helsinki early this week. About ninety people were present from four continents. Excellent invited talks were delivered e.g. by:

• Prof. Marc Heyns, IMEC, Belgium, 
• Dr. Simon Rushworth, EpiValence, UK
• Dr. Paul Williams, Pegasus Chemicals, UK
• Dr. David C. Smith, LAM Research, USA 
• Prof. Christophe Detavernier, Ghent University, Belgium
• Prof. Anjana Devi, Ruhr University Bochum, Germany
• Prof. Jaan Aarik,  University of Tartu, Estonia
• Prof. Erwin Kessels, Eindhoven University of Technology, The Netherlands

Thank you for all invited speakers and participants, as well as the organizers, especially Prof Markku Leskelä, the head of ALDCoE and the chairman of this event, and Dr. Ville Miikkulainen, who is the coordinator or ALDCoE and who was the main practical organizer of the event.

Riikka Puurunen pitching the VPHA organizational poster. Photo by Oili Ylivaara (Twitter via @rlpuu)

Some photos from the event are collected below, published in Twitter by Riikka Puurunen (@rlpuu), Oili Ylivaara (@ltoili), Pegasus Chemicals (@PegasusChemical) and in LinkedIn by Simon Rushworth. A collection of earlier VPHA-related travel reports published in the ALD History Blog can be found here.

VPHA status update 2016-04-29

 The status update below was sent to 54 co-authors and 35 prospective co-authors.

---

Dear VPHA co-authors and prospective co-authors,

About a month has passed since the previous status update on March 31. It is a good time to stop again and see what has been the progress of last month. You can access previous updates in this link. This status update contains information on the following topics:

1 VPHA reading for ALD 2016 Dublin

2 LinkedIn ALD terminology discussion: GPC

3 ALD conference list

4 VPHA organizational poster in the HERALD Helsinki meeting

5 ALD History Blog statistics after half a year of the blog

Organizational presentation abstract of VPHA, Helsinki, May 23-24

The abstract of the organizational poster of VPHA, "Virtual Project on the History of ALD: overview and current status" has been finalized and submitted to the combined HERALD Working group 2 workshop and 4th annual seminar of ALDCoE "ALD precursors and processes", May 23-24, 2016, Helsinki, Finland, organized by the Finnish Centre of Excellence in Atomic Layer Deposition.

The abstract can be accessed in full here: http://vph-ald.com/VPHApublications/2016MayHelsinki_VPHA-Puurunen-et-al_2016-04-28_FINAL.pdf . The abstract text is copied below.

VPHA correspondence: Organizational poster in Helsinki, pls check thanks by 27.4.

The email below was sent to 53 VPHA co-authors and 34 prospective co-authors.

--- 

Dear VPHA authors and prospective co-authors,

A combined HERALD Working group 2 workshop and 4th annual seminar of ALDCoE "ALD precursors and processes" will be organized May 23-24 in Helsinki, see http://www.aldcoe.fi/herald/index.html.

As one of the organizers, I will naturally participate this event. There will be many posters by local ALD scientist. It should be good to present an overview the progress of VPHA at this event, so we plan to send in an organizational VPHA poster, similarly as we did at Baltic ALD in Tartu. A draft of the related abstract is attached to this email. <attachment not included in this ALD History Blog post>

In the Acknowledgements section, we would like to extend thanks to all VPHA participants. Please have a look at this section and let me know if you see your name missing or incorrectly spelled, or if you see other needs for revision. Please send me your requests for change latest on Wednesday, April 27.

The VPHA reading progresses nicely again, this you see e.g. from the graph included in a recent ALD History Blog post: http://aldhistory.blogspot.fi/2016/04/vpha-reading-proceeds-now-44percent-completed.html If there are new people who give their first comments in the ALD-history-evolving-file by April 27, we will update the acknowledgements with their names.

Best regards,

Riikka, VPHA coordinator

---

Riikka Puurunen (Dr.), Senior Scientist, Microsystems and Nanoelectronics; Project Manager (IPMA C)

VTT Technical Research Centre of Finland, Tietotie 3, Espoo (P.O. Box 1000), FI-02044 Espoo (VTT), Finland

< >, www.vttresearch.com, www.aldcoe.fi

fi.linkedin.com/in/riikkapuurunen, vph-ald.com, aldhistory.blogspot.fi, twitter.com/rlpuu

*************** 

Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust