Friday, 2 July 2021

"ALD 101" tutorial by Puurunen at ALD 2021 available at Aalto ALD OpenLearning

At the 21st International Conference on Atomic Layer Deposition (ALD 2021),, organized as a virtual meeting, Prof. Riikka Puurunen gave an invited tutorial:  Fundamentals of atomic layer deposition: an introduction (“ALD101”). Among other things, this tutorial presented the two independent development routes of ALD and discussed the field's progress in understanding the history of ALD. The opening of the last phase of VPHA at the ALD Russia 2021 conference to come, mentioned.

The pre-recorded tutorial is available at the ALD OpenLearning site under Lecture recordings,, as well at other locations, both as slides and as recorded lecture: