(archiving VPHA website) The ALD history publications page of vph-ald.com, as of 2026-07-19

Copy from the VPHA website, as of 2026-07-19 (I copy the page exactly as it is, although obviously some links may be outdated)

*** COPY BEGINS, https://vph-ald.com/ALD-history-publications.html, 2026-07-19 ***

Newest publications first

1. Oral presentation (to-be): "Virtual Project on the History of ALD in perspective: past, present, and final steps", R.L. Puurunen, Yu. Koshtyal, J.R. van Ommen, O. Yurkevich,

   ALD Russia 2021 http://technolog.edu.ru/aldrussia/, Saint Petersburg, Russia, 27–30 September 2021, with online participation. Submitted abstract. Slides. Live record uploaded in Youtube.

2. Poster presentation: "Overview of doctoral theses on Atomic Layer Deposition collected in the Virtual Project on the History of ALD", (long list of authors), 19th International Conference on Atomic Layer Deposition (ALD 2019), July 21-24, 2019, Bellevue, Washington, http://ald2019.avs.org. Submitted abstract and supplementary information. Poster.
3. Poster presentation: "Overview of doctoral theses on Atomic Layer Deposition collected in the Virtual Project on the History of ALD", (long list of authors), 

   EuroCVD 22 - Baltic ALD 16, in Luxembourg, June 24-28, 2019. Submitted abstract. Poster. 

4. Proceedings article: R. L. Puurunen, "Learnings from an Open Science Effort: Virtual Project on the History of ALD", ECS Transactions 86(6) (2018) 3-17; doi:10.1149/08606.0003ecst. Open access preprint, DOI: 10.1149/osf.io/exyv3.
5. Progress in device from Molecular Layering to atomic layer deposition worldwide technology, Victor Drozd, Proceedings of the International Baltic Conference on Atomic Layer Deposition, 2-4 Oct 2016, St. Petersburg, Russia. Electronically published in IEEE Xplore, http://ieeexplore.ieee.org/document/7886521/.
6. Review article: “Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD””, Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael Bechelany, Maria Berdova, Stefan Boyadjiev, David C. Cameron, Rong Chen, Mikhail Chubarov, Veronique Cremers, Anjana Devi, Viktor Drozd, Liliya Elnikova, Gloria Gottardi, Kestutis Grigoras, Dennis M. Hausmann, Cheol Seong Hwang, Shih-Hui Jen, Tanja Kallio, Jaana Kanervo, Ivan Khmelnitskiy, Do Han Kim, Lev Klibanov, Yury Koshtyal, A. Outi I. Krause, Jakob Kuhs, Irina Kärkkänen, Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Adam A. Łapicki, Markku Leskelä, Harri Lipsanen, Jussi Lyytinen, Anatoly Malkov, Anatoly Malygin, Abdelkader Mennad, Christian Militzer, Jyrki Molarius, Małgorzata Norek, Çağla Özgit-Akgün, Mikhail Panov, Henrik Pedersen, Fabien Piallat, Georgi Popov, Riikka L. Puurunen, Geert Rampelberg, Robin H. A. Ras, Erwan Rauwel, Fred Roozeboom, Timo Sajavaara, Hossein Salami, Hele Savin, Nathanaelle Schneider, Thomas E. Seidel, Jonas Sundqvist, Dmitry B. Suyatin, Tobias Törndahl, J. Ruud van Ommen, Claudia Wiemer, Oili M. E. Ylivaara, Oksana Yurkevich, Journal of Vacuum Science and Technology A 35 (2017) 010801 (13 pages). http://dx.doi.org/10.1116/1.4971389. Open access.
7. Invited talk: "On the history of ALD and the VPHA project", by R. L. Puurunen, Yu. Koshtyal, H. Pedersen, J. R. van Ommen, O. Yurkevich, J. Sundqvist, 14th International Conference on Atomic Layer Deposition, October 2-4, 2016, St. Petersburg, Russia. Abstract. Slides. Travel report. Live record of the presentation uploaded in the VPHA website and Youtube. Recorded slides (Oct 5).
8. Invited plenary talk "Structural-size effects in the products obtained by the molecular layering method and their application", by Anatolii Malygin at 16th International Conference on Atomic Layer Deposition (ALD 2016), July 24-27, 2016, Dublin, Ireland. Abstract. Slides. Travel report.
9. Poster presentation: "On the early history of atomic layer deposition: most significant works and applications", Jaan Aarik, Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael Bechelany, Maria Berdova, Stefan Boyadjiev, David Cameron, Nikolai Chekurov, Mikhail Chubarov, Veronique Cremers, Anjana Devi, Viktor Drozd, Simon Elliott, Liliya Elnikova, Gloria Gottardi, Kestutis Grigoras, Dennis Hausmann, Cheol Seong Hwang, Marcel Junige, Shih-Hui Jen, Tanja Kallio, Jaana Kanervo, Ivan Khmelnitskiy, Do Han Kim, Lev Klibanov, Yury Koshtyal, Outi Krause, Jakob Kuhs, Irina Kärkkänen, Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Adam Lapicki, Markku Leskelä, Harri Lipsanen, Jussi Lyytinen, Anatoly Malkov, Anatoly Malygin, Christian Militzer, Jyrki Molarius, Małgorzata Norek, Cagla Ozgit-Akgun, Mikhail Panov, Henrik Pedersen, Luis Fabián Peña, Fabien Piallat, Georgi Popov, Riikka L. Puurunen, Alexander Pyymaki Perros, Geert Rampelberg, Robin H. A. Ras, Erwan Rauwel, Fred Roozeboom, Timo Sajavaara, Hossein Salami, Hele Savin, Nathanaelle Schneider, Thomas E. Seidel, Pia Sundberg, Jonas Sundqvist, Dmitry Suyatin, Massimo Tallarida, Tobias Törndahl, Mikko Utriainen, J. Ruud van Ommen, Thomas Wächtler, Claudia Wiemer, Oili M. E. Ylivaara, Oksana Yurkevich, 16th International Conference on Atomic Layer Deposition (ALD 2016), July 24-27, 2016, Dublin, Ireland. View submitted abstract in the ALD History Blog, flash presentation slides, final abstract, poster. Travel report.
10. Poster presentation, "Virtual Project on the History of ALD: overview and current status", by R. L. Puurunen, Yu. Koshtyal, H. Pedersen, J. R. van Ommen, O. Yurkevich, J. Sundqvist, combined HERALD Working group 2 workshop and 4th annual seminar of ALDCoE "ALD precursors and processes", May 23-24, 2016, Helsinki, Finland. Abstract, poster, one-slider. Travel notes.
11. Essay by A. A. Malygin, V. E. Drozd, A. A. Malkov, V. M. Smirnov, "From V. B. Aleskovskii’s "Framework" Hypothesis to the Method of Molecular Layering/Atomic Layer Deposition", Chemical Vapor Deposition 21 (2015) 216-240. DOI: 10.1002/cvde.201502013
12. Poster presentation, "Virtual Project on the History of ALD: overview and current status", by R. L. Puurunen, Yu. Koshtyal, H. Pedersen, J. R. van Ommen, J. Sundqvist, 13th International Baltic Conference on Atomic Layer Deposition, September 28-29, 2015, Tartu, Estonia. Abstract. Poster. Travel report.
13. Oral presentation, "Virtual Project on the History of ALD: overview and current status", by R. L. Puurunen, Yu. Koshtyal, H. Pedersen, J. R. van Ommen, J. Sundqvist, International workshop Atomic Layer Deposition Russia 2015, 21-23 September, 2015, Moscow-Dolgoprudny, Russia. Abstract. Slides. Travel report.
14. Invited talk by A. A. Malygin, "The origins of ML-ALD in the USSR-Russia: from V. B. Aleskovskiiיs “framework hypothesis” on the path to precise synthesis of solids" International workshop Atomic Layer Deposition Russia 2015, 21-23 September, 2015, Moscow-Dolgoprudny, Russia. Slides.
15. Exhibition by the Finnish Centre of Excellence on Atomic Layer Deposition: "40 Years of ALD in Finland - Photos, Stories". Exhibition material released to internet 29.11.2014: VPHA website and at ALDCoE website.
16. Essay by R. L. Puurunen, "A short history of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy", Chemical Vapor Deposition 20 (2014) 332-344, DOI: 10.1002/cvde.201402012. Open Access. Full essay.
17. Invited tutorial by R. L. Puurunen, "History of Atomic Layer Deposition", at the International AVS Conference on Atomic Layer Deposition), June 15-18, 2014, Kyoto, Japan
18. Poster presentation "On the Early History of ALD: Molecular Layering," by (author order: alphabetical) J. Aarik, A. R. Akbashev, M. Bechelany, M. Berdova, D. Cameron, N. Chekurov, V. E. Drozd, S. D. Elliott, G. Gottardi, K. Grigoras, M. Junige, T. Kallio, J. Kanervo, Yu. Koshtyal, M.-L. Kääriäinen, T. Kääriäinen, L. Lamagna, A. Malkov, A. Malygin, J. Molarius, C. Ozgit-Akgun, H. Pedersen, R. L. Puurunen, A. Pyymäki Perros, R. H. A. Ras, F. Roozeboom, T. Sajavaara, H. Savin, T. E. Seidel, P. Sundberg, J. Sundqvist, M. Tallarida, J. R. van Ommen, T. Wächtler, C. Wiemer, O. M. E. Ylivaara, ALD 2014 (14th International Conference on Atomic Layer Deposition), June 15-18, 2014, Kyoto, Japan. Abstract.
19. Poster presentation "Overview of early publications on Atomic Layer Deposition," by (author order: alphabetical) J. Aarik, A. R. Akbashev, M. Bechelany, M. Berdova, D. Cameron, N. Chekurov, V. E. Drozd, S. D. Elliott, G. Gottardi, K. Grigoras, M. Junige, T. Kallio, J. Kanervo, Yu. Koshtyal, M.-L. Kääriäinen, T. Kääriäinen, L. Lamagna, A. Malkov, A. Malygin, J. Molarius, C. Ozgit-Akgun, H. Pedersen, R. L. Puurunen, A. Pyymäki Perros, R. H. A. Ras, F. Roozeboom, T. Sajavaara, H. Savin, T. E. Seidel, P. Sundberg, J. Sundqvist, M. Tallarida, J. R. van Ommen, T. Wächtler, C. Wiemer, O. M. E. Ylivaara, ALD 2014 (14th International Conference on Atomic Layer Deposition), June 15-18, 2014, Kyoto, Japan. Abstract.
20. Poster presentation "Overview of early publications on Atomic Layer Deposition," by (author order: alphabetical) J. Aarik, A. R. Akbashev, M. Bechelany, M. Berdova, D. Cameron, N. Chekurov, V. E. Drozd, S. D. Elliott, G. Gottardi, K. Grigoras, T. Kallio, J. Kanervo, Yu. Koshtyal, M.-L. Kääriäinen, T. Kääriäinen, L. Lamagna, A. Malkov, A. Malygin, C. Ozgit-Akgun, H. Pedersen, R. L. Puurunen, A. Pyymäki Perros, R. H. A. Ras, F. Roozeboom, T. Sajavaara, H. Savin, T. E. Seidel, P. Sundberg, J. Sundqvist, M. Tallarida, J. R. van Ommen, T. Wächtler, C. Wiemer, O. M. E. Ylivaara, Baltic ALD 2014 (12th International Baltic Conference on Atomic Layer Deposition), May 12-13, Helsinki, Finland. Abstract.
21. Invited conference talk by V. E. Drozd at Baltic ALD, May 12-13, 2014, University of Helsinki, Finland: "ML-ALD seeks its niche in education, science and application".
22. Invited conference talk by T. Suntola at Baltic ALD, May 12-13, 2014, Helsinki, Finland: "40 Years of ALD in Finland - from ideas to global industry"
23. Invited seminar talk by R. L. Puurunen, November 15, 2013, Beneq and ETU (LETI) joint ALD laboratory opening seminar, St. Petersburg, Russia "History of ALD: from lab research to industrial applications".   
24. Review article by G. N. Parsons, J. W. Elam, S. M. George, S. Haukka, H. Jeon, W. M. M. Kessels, M. Leskelä, P. Poodt, M. Ritala, S. M. Rossnagel  "History of atomic layer deposition and its relationship with the American Vacuum Society", J. Vac. Sci. Technol. A 31, 050818 (2013); http://doi.org/10.1116/1.4816548.

    Erratum: “History of atomic layer deposition and its relationship with the American Vacuum Society” [J. Vac. Sci. Technol. A 31, 050818 (2013)]",

    J. Vac. Sci. Technol. A 38, 037001 (2020); https://doi.org/10.1116/6.0000143. 

25. Plenary  conference talk by S. M. George at International AVS Conference on Atomic Layer Deposition, "Atomic Layer Deposition from Development to Commercialization", July 28-31, 2013, San Diego, California.
26. Book chapter by E.-L. Lakomaa, M. Lindblad, A. Kytökivi, H. Siro-Minkkinen and S. Haukka, "Catalyst processing development by Atomic Layer Epitaxy"; pp. 93-103, in book: Catalysis in Finland: an exciting pathway, Eds. K. Arve, H. Harju, A. Heponiemi, J. Linnekoski, P. Mäki-Arvela, S. Ojala, T. Salmi, S. Sundblom, A. Suopanki, S. Wallenius,  © Suomen katalyysiseura, ISBN 978-952-93-3085-0 (nid.), ISBN 978-952-93-3086-7 (PDF), Otavan Kirjapaino Oy, Keuruu 2013, pp. 1-428.
27. Conference presentation by A. A. Malygin at the Hilovo conference, 2012, entitled (in Russian, title translated) "Contribution of V. B. Aleskovskii and his scientific school in the development of Solid State Chemistry and Nanotechnology", the Fifth All-Russian Conference (with international participation) on the Surface Chemistry and Nanotechnology, Saint Petersburg - Hilovo, Russia, September 24-30, 2012. The presentation celebrated 100 years from Prof. Aleskovskii's birth.
28. Book chapter by J. Niinistö and L. Niinistö, "Introduction: basic features and historical development of atomic layer deposition" Atomic Layer Deposition of Nanostructured Materials. Pinna, N. & Knez, M. (eds.). 1st ed. Weinheim: Wiley-VCH 2012, 11 p.
29. Review article by R. L. Puurunen, "Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process", J. Appl. Phys., 97, 121301 (2005); http://dx.doi.org/10.1063/1.1940727
30. Invited conference talk by T. Suntola at AVS-ALD conference, 2004, August 16-18, 2004, University of Helsinki, Finland: "30 Years of ALD"
31. Letter to the editor by A. A. Malygin and V. M. Smirnov, "Early work on atomic layer deposition cited", Solid State Technology, 2002, March, p. 14.
32. Review article by T. Suntola, "Atomic layer epitaxy," Material Science Reports, 1989, 4, 261-312, http://dx.doi.org/10.1016/S0920-2307(89)80006-4.

*** COPY ENDS, https://vph-ald.com/ALD-history-publications.html, 2026-07-19 ***

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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust

(archiving VPHA website) The VPHA Blog page of vph-ald.com, as of 2026-07-19

Copy from the VPHA website, as of 2026-07-19 (I copy the page exactly as it is, although obviously some links may be outdated)

*** COPY BEGINS, https://vph-ald.com/vphablog.html, 2026-07-19 ***

A blog related to the VPHA has been created, to accompany this vph-ald.com website. The blog was initiated on 25.10.2015.

The blog is called ALD History Blog and can be found at: http://aldhistory.blogspot.fi

(If possible, it would be nice to show the blog posts directly on this page --- a suitable technical solution is needed, hints welcome.)

*** COPY ENDS, https://vph-ald.com/vphablog.html, 2026-07-19 ***

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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust

(archiving VPHA website) The VPHA open files page of vph-ald.com, as of 2026-07-19

Copy from the VPHA website, as of 2026-07-19 (I copy the page exactly as it is, although obviously some links may be outdated)

*** COPY BEGINS, https://vph-ald.com/VPHAopenfiles.html, 2026-07-19 ***

ALD-history-evolving-file, link

• in Google docs
• Everyone can view & comment
• Editing rights granted to active users on request
• Please read through the "Instructions on how to participate in this “virtual project” " before you start commenting/editing the file. The instructions are found directly in the Google file itself.

VPHA-reading-overview-file, link

• in Google docs
• Everyone can view & comment
• Editing rights granted to active users on request

VPHA-reading-workflow, link

• in Google docs, everyone can view
• This file contains instructions, how to update the VPHA-reading-overview-file when adding comments to the ALD-history-evolving-file
• First version published August 2, 2015

VPHA-translations, link

• Google docs file
• Contains translations made of early ALD publications into English from the original language of publication by/for the VPHA participants
• Everyone is able to view and comment, limited editing rights

ALD-history-review-questions, link

• in Google docs
• Anyone can comment, ediging rights can be granted upon request
• --> ALD-history-review-questions-discussion link, currently for limited users

WikiALD-update-WIP, link

• in Google docs
• Everyone can comment
• Editing rights can be granted to all who participate in the ALD Wipedia Update task

VPHA-ALD-terminology, link

• in Google docs
• Everyone can comment
• Editing rights can be granted to VPHA participants upon request

VPHA-ALD-thesis-list, link

• in Google docs
• Everyone can comment
• A few ALD History Review co-authors have editing rights
• TO ADD INFO: please put info of the thesis to be added in a file that all can edit, VPHA-thesis-to-be-added.

VPHA-ALD-reviews, link

• in Google docs
• Everyone can comment
• A few ALD History Review co-authors have editing rights
• TO ADD INFO: please put info of reviews and a like to be added in a file which all can edit, VPHA-reviews-to-be-added.
• TO RECOMMEND A REVIEW for others to read, especially newcomers to ALD: please access Recommended-ALD-reviews-evolving-file, follow the instructions there, and formulate and share your personal reading recommendation (for works authored by others than yourself or your close relatives). 

CatALD-reviews, link

• in Google docs, "sister file" of VPHA-ALD-reviews, for catalysis related reviews
• Everyone can comment
• TO ADD INFO: please put the info in the file which all can edit, VPHA-reviews-to-be-added.
• Please email to riikka.puurunen at aalto.fi to send a note that a review should be added to CatALD-reviews

VPHA-ALD-conference-list,  link

• in Google docs
• Everyone can comment
• A few ALD History Review co-authors have editing rights
• TO ADD INFO: please put info of reviews and a like to be added in a file which all can edit, VPHA-conference-to-be-added

VPHA-author-info-update, link

• in Google docs
• Everyone can comment
• A few ALD History Review co-authors have editing rights
• to add/alter info: please email info@ vph-ald.com.

VPHA voting for ALD 2016 poster

• to form the conclusive recommended reading list as promised in the abstract
• VPHA-voting-file (open for everyone to view)
• VPHA-voting-instructions (open for everyone to view)
• VPHA-voting-ENTRY-file (open for everyone to edit)

ALD-history-review-TOC-DRAFT, link

VPHA-archival-thoughts, link

test editing file, "sandbox", link

• in Google docs
• This file is there to provide a test place for playing around with co-editign in Google docs for those who do not dare to edit the main files directly. You can make whatever trials with this.

--

Files under construction (not yet for open commenting)

• VPHA-code-change-history link
• VPHA-JVSTA-comments link

---

older files

ALD-history-ML-questions link

• in Google docs
• For those already listed as contributors in the ALD-history-evolving-file
• No more in use (closed Jan 2015)

*** COPY ENDS, https://vph-ald.com/VPHAopenfiles.html, 2026-07-19 ***

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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust

(archiving VPHA website) The Publication Plan page of vph-ald.com, as of 2026-07-19

Copy from the VPHA website, as of 2026-07-19 (I copy the page exactly as it is, although obviously some links may be outdated)

*** COPY BEGINS, https://vph-ald.com/Publication%20Plan.html, 2026-07-19 ***

Publication Plan v3 published originally here, April 5, 2015

Publication Plan v2 here, dated January 13, 2014

Publication Plan v1 here, dated October 18, 2013

Publication Plan for the

Virtual Project on the History of ALD, v3.0

April 5, 2015

On behalf of all the VPHA contributors

Riikka Puurunen (Dr.), Senior Scientist, VTT Technical Research Centre of Finland

Jonas Sundqvist (Dr.), Lab Operations Manager, Lund Nano Lab, Lund University, Sweden

Henrik Pedersen, Associate Professor, Linköping University, Sweden

Annina Titoff, Editor-in-Chief, aldpulse.com

Current VPHA authors: Aarik, Jaan (Prof.), Akbashev, Andrew (M. Sc.), Bechelany, Mikhael (Dr.), Berdova, Maria (M. Sc.), Cameron, David (Prof.), Chekurov, Nikolai (Dr.), Drozd, Victor E. (Assoc. Prof.), Elliott, Simon D. (Dr.), Gottardi, Gloria (Dr.), Grigoras, Kestutis (Dr.), Junige, Marcel (M.Sc.), Kallio, Tanja (Dr.), Kanervo, Jaana (Dr.), Koshtyal, Yury (Dr.),

Kääriäinen, Marja-Leena (Dr.), Kääriäinen, Tommi O. (Dr.), Lamagna, Luca (Dr.), Malkov, Anatolii (Assoc. Prof.),

Malygin, Anatoly (Prof.), Molarius Jyrki (Dr.), Ozgit-Akgun, Cagla (Dr.), Pedersen, Henrik (Assoc. Prof.),

Puurunen, Riikka L. (Dr.), Pyymäki Perros, Alexander (M. Sc.), Ras, Robin H. A. (Prof.), Roozeboom, Fred (Prof.), Sajavaara, Timo (Dr.), Savin, Hele (Prof.), Seidel, Thomas E. (Dr.), Sundberg, Pia (Dr.), Sundqvist, Jonas (Dr.), Tallarida, Massimo (Dr.), van Ommen, J. Ruud (Dr.), Thomas Waechtler (Dr.), Wiemer, Claudia (Dr.), Ylivaara, Oili M. E. (M. Sc.)

 

Background

This publication plan is related to the “Virtual Project on the History of ALD” (VPHA), of which the original Introduction and Invitation to Participate can be found in http://aldpulse.com/node/189 as well as through the recent dedicated VPHA webpage http://vph-ald.com.

The goals of the publication plan are 1) to document early publications about ALD and spread information about them, and 2) to promote interaction amongst the ALD community.

This is the 3rd version (2nd update) of the Publication Plan. The earlier versions can be accessed through http://vph-ald.com.

1) Poster at Baltic ALD 2014

The plan is to publish the result of the “virtual project on the history of ALD” (info: http://aldpulse.com/node/189) first as a poster at the Baltic ALD conference, Helsinki, May 12-13, 2014.

The poster will report the literature list and personal comments on the individual publications similarly as collected in the “Google file”, link here. Up to year 1986 will be covered. [The time limit comes from the review of Goodman and Pessa, J. Appl. Phys. 60, R65 (1986), after which ALD literature cannot be considered “early”.]

The poster will have OPEN AUTHORSHIP, meaning that anyone who is interested to contribute in the building of an overview of the early history of ALD, may join the poster.

Each author should provide minimum one comment.

The author list will be alphabetical (basis: last name).

There will be no upper limit for the number of authors: the more authors there are, the better. (Count as of Jan 13, 2014: 23 authors from 9 countries.)

The conference deadline for the poster abstract is January 31. In practice, the abstract will be finalized and submitted a couple of days before that (latest Jan 28). 

We will start to finalize the actual poster in the beginning of April. Interested people can still join as authors for the poster at least until March 2014.

STATUS: Completed

Abstract of the published poster: http://vph-ald.com/VPHApublications/VPHA_BALD2014-abstract_FINAL-submitted_140202b.pdf

2) Poster at ALD 2014, Kyoto

The result of the “virtual project on the history of ALD” will be published as a poster also at the AVS-ALD 2014 conference, Kyoto, June 15-18, 2014. 

The concept for the poster at ALD 2014 in Kyoto will be similar as for the BALD 2014 poster, both concerning the contents and the OPEN AUTHORSHIP.

The conference deadline for the abstract is February 14. The plan is to submit the abstract on February 10, and interested authors can join until this date.

We will start to finalize the actual poster in the end of May. Interested people can still join as authors for the poster until May 15.   

STATUS: Completed

Abstract of the poster: http://vph-ald.com/VPHApublications/VPHA_Kyoto2014_overview-poster-abstract_FINAL-submitted_2014-02-26.pdf

Poster (to be printed in several layers, that is, “3-D”): http://vph-ald.com/VPHApublications/VPHA_Kyoto2014_overview-poster_3Dposter_2014-06-12.pdf.

3) Presentation at ALD 2014, Kyoto

We will request another presentation at ALD 2014. Oral presentation is preferred, but we will also be happy, if a poster presentation is granted.

The goal is to go one step further in interpretations than in the posters, and to describe the major “new” information found on the early evolution of ALD in the Virtual Project on the History of ALD.

There is OPEN AUTHORSHIP also for this.

The authors are listed in an alphabetical order.

Authors of this presentation should also be authors of the posters (vice versa is not necessary). 

If accepted as an oral presentation, the presentation will be given by Riikka. All authors will have a chance to propose contents and give comments on the presentation in advance. Would it be difficult to choose contents, Riikka Puurunen and Jonas Sundqvist will in the end decide what is included in the presentation. 

STATUS: Completed (a poster was granted) 

Poster abstract: http://vph-ald.com/VPHApublications/VPHA_Kyoto2014_ML-poster-abstract_FINAL-submitted_2014-02-26b.pdf

Poster: http://vph-ald.com/VPHApublications/VPHA_Kyoto2014_ML-poster_v15_FINAL.pdf

4) ALD history tutorial at ALD 2014, Kyoto

An invited tutorial on the history of ALD was presented by Riikka Puurunen AVS-ALD 2014 conference, Kyoto, June 15-18, 2014. The invitation came on the basis of the two VPHA abstracts. 

STATUS: Completed

Link: http://www.slideshare.net/RiikkaPuurunen/aldhistory-tutorial-in-kyoyo-al-dhistory-tutorialald2014riikkapuurunen20140615

5) Essay on the early history of ALE-ALD

The invention and development of ALD under the name Atomic Layer Epitaxy under the leadership of Tuomo Suntola was described in: “A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy”, written by Riikka L. Puurunen and published in Chemical Vapor Deposition 20 (2014) 332-344, DOI: 10.1002/cvde.201402012. Originally, the story was written for the “40 Years of ALD in Finland: Photos, Stories” (FinALD40) exhibition organized by the Finnish Centre of Excellence in Atomic Layer Deposition (http://www.aldcoe.fi/) for the Baltic ALD conference in Helsinki, May 12-13, 2014 (http://www.aldcoe.fi/bald2014/).   

STATUS: Completed

This essay was written and published in 2014. The writing of the essay was not yet foreseen in the original VPHA Publication Plan (dated October 18, 2013) and also not in its first update (version 2.0, dated January 13, 2014). The essay has been afterwards included in the VPHA outcomes in Publication Plan v 3.0.

6) Website for ALD history and VPHA

Link: http://vph-ald.com

STATUS: Completed

Updated with new info when needed (admin: R. Puurunen)

Update 19.12.2015: related ALD History Blog at http://aldhistory.blogspot.fi

7) Exhibition: 40 years of ALD in Finland - Photos, Stories (FinALD40)

Celebrating the 40 years history of the Finnish ALD the Academy of Finland’s Finnish Centre of Excellence on Atomic Layer Deposition, organized an exhibition: “40 Years of ALD in Finland - Photos, Stories”. Initially, the exhibition was organized for the international Baltic ALD conference, May 12-13, 2014, Helsinki (http://www.aldcoe.fi/bald2014/). The main organizers of the exhibition were Dr. Riikka Puurunen (VTT) and Dr. Jaakko Niinistö (University of Helsinki). The famous patent on Atomic Layer Epitaxy (FIN 52359) was filed on November 29, 1974 and this history material was released exactly 40 years later, November 29, 2014.

STATUS: Completed

Links: http://www.aldcoe.fi/events/finald40.pdf

http://vph-ald.com/UploadedPublications/FinALD40_web_2014-11-29_update2015-01-23.pdf

8) Review article/essay on the early history of ML-ALD

The invention and development of ALD under the name Molecular Layering under the leadership of Aleskovskii and Koltsov will be described in a review/essay. This review/essay will complement the already-published ALE-ALD essay. ALD professors in St. Petersburg lead the writing work. The VPHA participants help as appropriate, for example, by formulating questions to be answered in the review/essay.

STATUS: Completed (updated: 19.12.2015)

Malygin, A. A., Drozd, V. E., Malkov, A. A., Smirnov, V. M., "From V. B. Aleskovskii's “Framework” Hypothesis to the Method of Molecular Layering/Atomic Layer Deposition," Chemical Vapor Deposition 21 (2015) 216-240.

DOI: 10.1002/cvde.201502013

9) Presentation at ALD 2016

The plan is to publish the final literature list created in the VPHA as a poster at the AVS ALD 2016 conference.

The poster will report the literature list and personal comments on the individual publications similarly as collected in the “Google file”, link here. Up to year 1986 will be covered. [The time limit comes from the review of Goodman and Pessa, J. Appl. Phys. 60, R65 (1986), after which ALD literature cannot be considered “early”.]

The poster will have OPEN AUTHORSHIP, meaning that anyone who is interested to contribute in the building of an overview of the early history of ALD, may join the poster.

Each author should provide minimum one comment.

The author list will be alphabetical (basis: last name).

There will be no upper limit for the number of authors: the more authors there are, the better.

It is likely that the conference deadline for the poster abstract will be January-February 2016. The goal is to finalize and submit the abstract early January 2016.

Interested people can join as the reading work and thereby become authors of the poster-to-be at least until the time of submitting the abstract early January 2016.

STATUS: Completed (updated 23.7.2016)

abstract: http://vph-ald.com/VPHApublications/ALDep2016_0047.pdf

poster:  http://vph-ald.com/VPHApublications/VPHA-poster_July2016_FINAL_2016-07-19.pdf

(The final contents of the poster differ slightly from the plan above.)

10) Optional: general ALD history review article

After the review articles/essays on ALE-ALD and ML-ALD are ready, the VPHA group will judge whether there is still a need and place for a general ALD history review paper. If a further review will be written, the reading-work for VPHA and the poster presentation at AVS-ALD 2016 will form an important basis for it.

STATUS: Partly completed (updated 2.1.2017).

Review article based on the ALD 2016 poster published in JVSTA, with 62 authors. Link: http://dx.doi.org/10.1116/1.4971389. Related correspondence: http://aldhistory.blogspot.fi/search/label/JVSTA.

11) Updating wikipedia

If after accomplishing the “virtual project on the history of ALD” and writing the review paper it is evident that the information in wikipedia on the ALD pages can be improved, this will be done. (If you would like to volunteer for this, please contact us through the ALD History LinkedIn group.) 

Page of “atomic layer deposition”

Page of “atomic layer epitaxy”

Page of “multiple independent discoveries”

STATUS: Completed (updated 2.1.2017)

Updated regarding history: Atomic layer deposition, Atomic layer epitaxy, List of multiple discoveries. English pages created: Tuomo Suntola, Valentin Aleskovsky, Markku Leskelä.   

12) Closing the VPHA

The plan is to close the VPHA at the AVS ALD 2016 conference.

STATUS

* update 23.7.2016: Closing has been postponed from ALD 2016 to Baltic ALD 2016.

* updated 10.10.2016: Final presentation has been given at Baltic ALD 2016, link to pdf file: http://vph-ald.com/VPHApublications/VPHA-Puurunen-etal_FINAL_2016-10-03.pdf, link to Youtube record: https://youtu.be/DIArUktQ8xs. Despite that the last presentation has been given, the core reading still continuous as it has not been completed yet. To join the reading as a volunteer, please contact info@ vph-ald.com (delete the space).

13) Bonus item

Related to an invited talk at the ECS Fall 2018 symposium,  proceedings article has been written, as requested:

R. L. Puurunen, "Learnings from an Open Science Effort: Virtual Project on the History of ALD", ECS Transactions, in press (2018). Open access preprint, DOI: 10.1149/osf.io/exyv3.

*** COPY ENDS, https://vph-ald.com/Publication%20Plan.html, 2026-07-19 ***

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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust