VPHA abstract submitted to Ireland ALD 2016: 51 authors

Abstract of the Virtual Project on the History of ALD (VPHA) --- item #9 in the publication plan --- was submitted to Ireland ALD 2016 conference, with 51 authors from 15 countries. (After the submission, one person has already joined, so now we are with 52.) The abstract text is copied in full below.

The work that now remains to do related to the ALD 2016 presentation is to (i) complete the VPHA reading and (ii) create a "conclusive recommended reading list" of the most important early publications and applications. Creating this list will be collaborative work, where all VPHA participants can equally influence the results. More to come on the selection method later---we will first have to decide how to do it.

Interestingly, the conference publishes short biographies of the invited speakers. Here you find links to the current VPHA co-authors who are also invited speakers at the conference: Prof. Anatolii Malygin, Prof. Fred Roozeboom, Dr. Massimo Tallarida.

--- VPHA abstract submitted to Ireland ALD 2016 ---

On the early history of atomic layer deposition: most significant works and applications

Atomic layer deposition (ALD) is a technique that has been instrumental in enabling the semiconductor industry to maintain its adherence to Moore’s Law, and is becoming a game-changer in several other fields. A worldwide voluntary effort called “Virtual Project on the History of ALD” (VPHA), open for everyone with an ALD background to participate, was launched in summer 2013 to explore how the ALD concept was developed; which were the first ALD experiments; when, where, why and by whom they were made. Earlier VPHA outcomes were published at ALD 2014 (accessed through VPHA’s website http://vph-ald.com); VPHA has made steady progress since then. Here we will present a conclusive recommended reading list of the most significant early ALD publications and briefly review the most important individual works and applications.

Acknowledgements: We are grateful for Dr. Tuomo Suntola’s general support during the VPHA and for Dr. Aziz Abdulagatov’s and Annina Titoff’s assistance in initiating it. The VPHA would not have been possible without the recent advances in professional social networking and cloud computing. RLP acknowledges partial funding from the Finnish Centre of Excellence in Atomic Layer Deposition. The author list is intentionally in alphabetical order.

Jaan Aarik		University of Tartu, Institute of Physics, Estonia
Esko Ahvenniemi		Aalto University, Espoo, Finland
Andrew R. Akbashev		Drexel University, Philadelphia, Pennsylvania, USA
Mikhael Bechelany		CNRS University of Montpellier, Montpellier, France
Maria Berdova		Aalto University, Espoo, Finland
David Cameron		Masaryk University, Brno, Czech Republic
Nikolai Chekurov		Oxford Instruments Analytical Oy, Espoo, Finland
Mikhail Chubarov		SIMaP, Grenoble-INP, France
Viktor Drozd		St. Petersburg State University, St. Petersburg, Russia
Simon Elliott		Tyndall National Institute, University College Cork, Lee Maltings, Cork, Ireland
Gloria Gottardi		Fondazione Bruno Kessler, Center for Materials and Microsystems, Trento, Italy
Kestutis Grigoras		VTT Technical Research Centre of Finland, Espoo, Finland
Cheol Seong Hwang		Seoul National University, Seoul, Korea
Marcel Junige		Technische Universität Dresden, Dresden, Germany
Tanja Kallio		Aalto University, Espoo, Finland
Jaana Kanervo		Aalto University, Espoo, Finland
Khmelnitskiy, Ivan		St. Petersburg Electrotechnical University “LETI”, St. Petersburg, Russia
Yury Koshtyal		Ioffe Institute, St. Petersburg, Russia
Outi Krause		Aalto University, Espoo, Finland
Marja-Leena Kääriäinen		University of Colorado Boulder, Colorado, USA
Tommi Kääriäinen		University of Colorado Boulder, Colorado, USA
Luca Lamagna		STMicroelectronics, Agrate Brianza, Italy
Harri Lipsanen		Aalto University, Espoo, Finland
Jussi Lyytinen		Aalto University, Espoo, Finland
Anatoly Malkov		St. Petersburg State Technological Institute (Technical University),St. Petersburg, Russia
Anatoly Malygin		St. Petersburg State Technological Institute (Technical University),St. Petersburg, Russia
Jyrki Molarius		VTT Technical Research Centre of Finland, Espoo, Finland
Małgorzata ("Gosia") Norek		Military University of Technology, Warsaw, Poland
Cagla Ozgit-Akgun		Bilkent University, Ankara, Turkey
Mikhail Panov		St. Petersburg Electrotechnical University “LETI”, St. Petersburg, Russia
Henrik Pedersen		Linköping University, Linköping, Sweden
Fabien Piallat		Altatech, Montbonnot, France
Georgi Popov		University of Helsinki, Finland
Riikka L. Puurunen		VTT Technical Research Centre of Finland, Espoo, Finland
Alexander Pyymaki-Perros		Aalto University, Espoo, Finland
Robin H. A. Ras		Aalto University, Espoo, Finland
Fred Roozeboom		Eindhoven University of Technology, Eindhoven, and TNO, Eindhoven, The Netherlands
Timo Sajavaara		University of Jyväskylä, Jyväskylä, Finland
Hele Savin		Aalto University, Espoo, Finland
Thomas E. Seidel		Seitek50, Palm Coast, Florida, USA
Pia Sundberg		Aalto University, Espoo, Finland
Jonas Sundqvist		Lund University, Lund, Sweden
Dmitry Suyatin		Lund University, Lund, Sweden
Massimo Tallarida		ALBA Synchrotron Light Source, Barcelona, Spain
Tobias Törndahl		Uppsala University, Uppsala, Sweden
Mikko Utriainen		VTT Technical Research Centre of Finland, Espoo, Finland
J. Ruud van Ommen		Delft University of Technology, Delft, the Netherlands
Thomas Wächtler		Fraunhofer ENAS & TU Chemnitz, Chemnitz, Germany
Claudia Wiemer		Laboratorio MDM, IMM-CNR, Agrate Brianza, Italy
Oili M. E. Ylivaara		VTT Technical Research Centre of Finland, Espoo, Finland
Oksana Yurkevich		Immanuel Kant Baltic Federal University, Kaliningrad, Russia

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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust