Atomic Layer Deposition
- December 21, 2015: Reference to ML essay by Malygin et al. added to history section
- October 25, 2015: Reference to "Suntola ALE" essay by Puurunen added to history section, along with other changes
- March 13, 2015: Link to http://vph-ald.com added
- October 16, 2013: Link to AVS ALD History paper by Parsons et al. and a note of the creation of VPHA: "a virtual project on the early history of ALD has been started in 2013 by a group of scientists..."
- December 21, 2015: some mistakes corrected (they were reported in a previous post) and Suntola ALE essay by Puurunen added as reference. "This technique was invented in 1974, then patented the same year (patent published in 1977), by Dr. [[Tuomo Suntola]], at the Instrumentarium company, Finland. <ref>Puurunen, R. L., A short history of atomic layer deposition: Tuomo Suntola's Atomic Layer Epitaxy, Chem. Vap. Deposition 20 (2014) 332-344. http://onlinelibrary.wiley.com/doi/10.1002/cvde.201402012/full</ref>"
The updates made so far in VPHA have been small, easy-to-make updates; more through editing will follow.
While VPHA is dedicated to history, it is evident that the Atomic Layer Deposition page could be improved in many other ways, too. A general update is not within the scope of VPHA, but we can do something already during VPHA. One of the first things to do is to find a better introductory image (the current one leads one to think too much of growing full atomic layers in each cycle). If you have a suitable image in mind, of which you have the copyright and would be willing to donate to common usage through Wikipedia, please contact us.
Everyone interested in updating Wikipedia ALD pages is welcome to join the WikiALD update effort, as well as VPHA in general.
No comments:
Post a Comment