The cover letter of the VPHA JVSTA manuscript re-submission (minor revision) was as follows.
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Nashville, Tennessee, USA, November 9, 2016
Dear Editor
of JVSTA,
Thank you
for the referee comments and your decision “MINOR REVISION” (November 8, 2016) considering
our manuscript <code removed> entitled
”Recommended reading list of early publications
on Atomic Layer Deposition—outcome of the Virtual Project on the History of
ALD” by Ahvenniemi et al. (in total 62 co-authors).
Referee 1
finds the manuscript interesting and a step forward, agrees that the work
should be published, and judges the quality of writing to be at a very high
level (9/10). However, the referee finds the manuscript unsuitable for
publication in JVSTA, because “the manuscript as written does not fulfil the
expectations for a technical review article”. The referee makes many
suggestions towards expanding the manuscript to a full technical review.
Referee 2
finds the manuscript novel (8/10), of the highest possible impact (10/10) and
excellently written (10/10). Quoting the referee’s words: “The authors have a done a tremendous amount of work for this manuscript
and I personally think the community will greatly appreciate that.” The referee suggest the
publication basically as is, after the correction of a few minor typographical
errors.
Regarding
the comments of Referee 1: we thank the referee for his critical look. We agree
with the referee that it would be beneficial to have a full scientific review
article regarding the history of ALD. There are many scientific questions which
could and should be critically considered in the future. However, the current
manuscript is not that full scientific review: it is a start, and an important first
step forward. Indeed, the Journal Editor himself finds the manuscript
publishable in JVSTA. Quoting his words: “the goal of the article is not to be
a critical review but recommend a set of publications and summarize its
contents.” We as authors did not send the manuscript in as a critical review,
but we left it open to the journal to decide, to which category it should best
be placed (copy of cover letter of the submission here). We expect several scientific reviews to be
published during the next years, which will exploit the information in general collected
in the Virtual Project on the History of ALD and part of the information highlighted
in the current manuscript. As a summary: we have not been able to make changes
to the manuscript on the basis of the comments of Referee 1.
Regarding
the comments of Referee 2: we thank the
referee for the general high appreciation of our manuscript and for pointing
out the few typographical errors. The typos have been corrected in the revised
version, as well as similar other typographical errors which we found in our
own check (space missing between the number and degree sign of Celcius).
We hope
that you consider publishing the current revised version of the manuscript in
JVSTA. Although this may not be the
standard practice, we would highly appreciate it if you could allow the titles
of the works to be published in the reference list, as we have provided in the
manuscript. We believe that including the titles (which we have translated into
English, when necessary) will increase the readability of the article by
researchers of different backgrounds and thereby increase the general impact of
the current work.
On the behalf of all co-authors,
Riikka
Puurunen, corresponding author, VPHA voluntary coordinator
Riikka Puurunen (Dr.), Senior
Scientist, Microsystems and Nanoelectronics; Project Manager (IPMA C)
VTT
Technical Research Centre of Finland, Tietotie 3, Espoo (P.O. Box 1000),
FI-02044 Espoo (VTT), Finland
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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust
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