Saturday, 31 October 2015

VPHA status update email 2015-10-31



This email was sent on 31.10.2015 to all VPHA co-authors (38) and registered prospective co-authors (26). 

Would you would like to join the VPHA as a volunteer and as a prospective co-author receive these emails, please send an email to info@ vph-ald.com.

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Dear VPHA co-authors and prospective co-authors,

Progress has taken place in VPHA during the one and the half weeks regarding many aspects. Please find info below regarding:
  1. Update to the VPHA Introduction and Invitation to participate;
  2. Update to the ALD-history-evolving-file, including TOC addition
  3. New open file created: VPHA-translations;
  4. Small update made to Wikipedia;
  5. VPHA ALD History blog.


Best regards,
Riikka, the voluntary VPHA coordinator
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Riikka Puurunen (Dr.), Senior Scientist, Microsystems and Nanoelectronics; Project Manager (IPMA C)
VTT Technical Research Centre of Finland, Tietotie 3, Espoo (P.O. Box 1000), FI-02044 Espoo (VTT), Finland


1) Update to the VPHA Introduction and Invitation to participate  

Please find the updated Introduction and Invitation to participate here: http://vph-ald.com/Introduction%20and%20invitation%20to%20participate.html. The old version, from in July 2013, is included at the end of the file.

The updated version is dated October 25, 2015, and it is signed by Riikka Puurunen (VTT, Finland), Yury Koshtyal (Ioffe Institute, Russia), Henrik Pedersen (Linköping University, Sweden), Ruud Van Ommen (Delft University of Technology, The Netherlands), and Jonas Sundqvist (Technische Universität Dresden, Germany; Lund University, Sweden).


2) Update to ALD-history-evolving-file, including TOC addition

The ALD-history-evolving-file has been updated, mainly to accommodate the Update to the Introduction. At the same time, a Table of Contents (TOC) was added to the very beginning of the file. This will make it easier to navigate in this large file.  

Another way to navigate is, of course, the search function. With this, one can easily locate a particular reference, once you know the author or, even better, the unique code of the reference as is used in the VPHA - e.g. {Aleskovskii1974} or {Suntola1985}.


3) New open file created: VPHA-translations

A new open Google docs file has been created for VPHA: “VPHA-translations”. All translations of early ALD works made by VPHA participants will be collected in this file. You can find a link to it at http://vph-ald.com/VPHAopenfiles.html.

Currently, it contains translations of parts of the thesis of Aleskovskii and parts of the thesis by Drozd. Thank you to Maria Berdova, Fred Roozeboom and Victor Drozd for the current translations and for the permission to share them in this file.   

The VPHA-translations file can be viewed by everyone in real time. Individual commenting/editing permissions can be granted upon request.  


4) Small update to Wikipedia

One of the action items in the Virtual Project on the History of ALD (VPHA) is to update the Wikipedia Atomic Layer Deposition https://en.wikipedia.org/wiki/Atomic_layer_deposition history description (see Publication Plan).

A small important modification was recently made, as the "ALE Essay" was added to the reference list to the following statement. (Thanks to Jonas Sundqvist for taking care of this.) The text reads currently as follows. Before the edit, this same statement was there, without any reference to further source of information.

"It was the work of Dr Tuomo Suntola and coworkers in Finland in mid-1970s that made the scientific idea a true thin film deposition technology and took that into an industrial use and worldwide awareness.[4] "

Ref 4: Riikka L. Puurunen, A Short History of Atomic Layer Deposition: Tuomo Suntola’s Atomic Layer Epitaxy, Chemical Vapor Deposition, 2014, Vol 20, Issue 10-11-12, pages 332-344, http://onlinelibrary.wiley.com/doi/10.1002/cvde.201402012/full


5) VPHA ALD History blog

A blog has been created to accompany the VPHA website and the LinkedIn ALD History group. You can find the blog at http://aldhistory.blogspot.fi. There is also a link to the blog at the left-side quick launch bar in http://vph-ald.com.   

The blog idea is new, and how it will be used, will probably evolve with time. There are many advantages of having the blog, among others, easiness of writing, sharing, and archiving. The balance between emails-LinkedIn-VPHAblog is still to be seen, all three methods of updating will in any case continue.

About the use of the blog:
  • Expect to get updates on the status and progress of VPHA
  • The will also be posts regarding past events (VPHA started in 2013) and the general background of the VPHA ALD history project
  • There can be guest posts, too
  • You can order new posts by email for easy following
  • The label cloud, blog archive and search function help one to navigate and find relevant posts


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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust

Friday, 30 October 2015

New: VPHA ALD history translations file

A new file has been created: VPHA-translations. One can access it through http://vph-ald.com/VPHAopenfiles.html. In this file, we collect the translations made in the Virtual Project on the History of ALD (VPHA) for early publications on Atomic Layer Deposition (ALD).  The translations in this file are informal, work-in-progess type of translations made by VPHA volunteers. Changes, additions, removals are all possible.

As of 30.10.2015, the file contains two translations. Both represent parts significant academic theses regarding Molacular Layering, originally in Russian. One is the Doctor of science thesis by Aleskovskii in 1952 and the other the Candidate of Science (corresponds roughly to PhD) by Drozd in 1978. Thanks to Maria Berdova, Fred Roozeboom and Victor Drozd for the translations and for the permission to include them in this file for the referral by others.

Some comments have already been given in VPHA reading regarding these theses, written in the ALD-history-evolving file, also accessible through http://vph-ald.com/VPHAopenfiles.html. One can search with the current VPHA codes  {Aleskovskii1952} and {Drozd1978-PhD} to find them easily in the large file.  The Aleskovskii thesis already has several comments made by the VPHA authors; more comments on the significance are still welcome. Regarding the Drozd thesis, we would still need one more comment, to have the minimum number of three that we would like to have for each publication in VPHA.


Thursday, 29 October 2015

VPHA presentations at ALD Russia and Baltic ALD invite more people to join

In September 2015, two organisational presentations were published related to VPHA, first at ALD Russia in Dolgoprudny, Moscow region, and the following week at Baltic ALD in Tartu, with the goal to invite more people to join the VPHA reading work. The greatest need currently is for people who know both English and Russian languages. Also people with skills of Estonian, Finnish, French, German, and Japanese are needed (and maybe some languages not listed).

Publication details and links:
  • Oral presentation, "Virtual Project on the History of ALD: overview and current status", by R. L. Puurunen, Yu. Koshtyal, H. Pedersen, J. R. van Ommen, J. Sundqvist, International workshop Atomic Layer Deposition Russia 2015, 21-23 September, 2015, Moscow-Dolgoprudny, Russia. Abstract. Slides
  • Poster presentation, "Virtual Project on the History of ALD: overview and current status", by R. L. Puurunen, Yu. Koshtyal, H. Pedersen, J. R. van Ommen, J. Sundqvist, 13th International Baltic Conference on Atomic Layer Deposition, September 28-29, 2015, Tartu, Estonia. Abstract. Poster
Motivation of the VPHA, from the Baltic ALD poster:
"VPHA background: Why? What? When? ALD developed under the names • Molecular Layering ML; Молекулярное Наслаивание • Atomic Layer Epitaxy ALE Especially the work made under the name Molecular Layering has been poorly known and cited"
From the Baltic ALD poster, VPHA in numbers:


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Virtual Project on the History of ALD (VPHA), http://vph-ald.com, in atmosphere of Openness, Respect, and Trust.

Wednesday, 28 October 2015

VPHA ALD history blog goes public

Three days after its initiation, the VPHA ALD history blog at http://aldhistory.blogspot.fi is sufficiently ready to be released for search engines to find. Improvements to the appearance and contents of the blog will be made as new ideas come.
  • Expect to get updates on the status and progress of VPHA
  • The will also be posts regarding past events (VPHA started in 2013) and the general background of the VPHA ALD history project 
  • There can be guest posts, too
  • You can order new posts by email for easy following
  • The label cloud, blog archive and search function help one to navigate and find relevant posts 
VPHA co-authors, other Atomic Layer Deposition scientists, other scientists, industry experts, historians, journalists, and other interested folks, welcome! I hope that you will find interesting content here. Feel free to leave (polite) comments.


Virtual Project on the History of ALD (VPHA), http://vph-ald.com, in atmosphere of Openness, Respect, and Trust.


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Updated 10.11.2015: VPHA ALD blog replaced with VPHA ALD history blog

Sunday, 25 October 2015

Minor Wikipedia update: ALE essay added

One of the action items in the Virtual Project on the History of ALD (VPHA) is to update the Wikipedia Atomic Layer Deposition section https://en.wikipedia.org/wiki/Atomic_layer_deposition, what comes to the history description (see Publication Plan).

Today, a minor important modification was made, as the "ALE Essay" was added to the reference list to the following statement. Before today, this same statement was there, but without any reference to further sources.
"It was the work of Dr Tuomo Suntola and coworkers in Finland in mid-1970s that made the scientific idea a true thin film deposition technology and took that into an industrial use and worldwide awareness.[4] "

VPHA status update 2015-10-21

An email status update was sent on October 21, 2015, to VPHA co-authors and prospective co-authors. Shortened version below. 

If you would like to get the full status updates by email, please contact the VPHA organizers by sending email to info@ vph-ald.com or through the LinkedIn ALD History group. The VPHA update emails are always sent with receiving addresses in the bcc field, to avoid large reply-to-all email chains. 

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Significant progress has taken place regarding the Virtual Project on the History of ALD within the past weeks. Please find below an update considering six topics.

ALD-history-evolving-file has a table of contents

The ALD-history-evolving-file has been updated today, mainly to accommodate the Update to the Introduction. At the same time, to make it easier to navigate in this large file, a Table of Contents (TOC) was added to the very beginning of the file.

Another way to navigate is, of course, the search function. With this, one can easily locate a particular reference, once you know the author or, even better, the unique code of the reference as is used in the VPHA - e.g. {Aleskovskii1974} or {Suntola1985}.

VPHA: Update to Introduction and Invitation to participate

The Virtual Project on the History of ALD (VPHA) has as of today (October 25, 2015) existed for two years and three months. A lot of progress has been booked since the beginning, while there is still a significant amount of work to do, too.

The original "Introduction and Invitation to participate" of the volunteer-based VPHA was published on July 25, 2013. The invitation to participate is still valid, as we plan to continue VPHA until summer 2016.

Because of the progress, we thought that it would be good to create an update for the Introduction, to guide the reader to the current information. The Update as well as the original Introduction can be found on the vph-ald.com webpage and are copied in full below.

VPHA blog created

Blog created October 25, 2015.