I would not yet call this a recommended reading list yet for the history of ALD, as the work is still very much on-going --- about 40% of the effort is now done. It does seem obvious, however, that in the end of VPHA the most interesting/important (and maybe also at the same time accessible) articles will have received more comments than average and that one kind of recommendation for "early ALD history reading" can ben created merely on the basis of the number of comments given for each publication.
Lists for zero, one, two and three comments are:
- http://aldhistory.blogspot.fi/2016/01/historical-ald-publications-with-two.html
- http://aldhistory.blogspot.fi/2016/01/historical-ald-articles-with-one-comment.html
- http://aldhistory.blogspot.fi/2016/01/historical-ald-articles-with-no-comments.html
- http://aldhistory.blogspot.fi/2016/01/historical-ald-publications-with-three.html
You find a link to the VPHA-reading-overview-file and to the other working files of VPHA in http://vph-ald.com/VPHAopenfiles.html.
{Aleskovskii1965} ru | Some characteristics of molecular layering reactions |
{Koltsov1965} en ru | Interaction of trichlorosilane with silica gel |
{Shevjakov1967} en ru | Interaction of titanium and germanium tetrachlorides with hydrated silica |
{Aleskovskii1974} en ru | Chemistry and technology of solids |
{Khalif1977} en ru | Heats of adsorption of oxygen on vanadium oxide applied to Aerosil by molecular stratification |
{Aleskovskii1952} ru | Aleskovskii thesis: Matrix hypothesis and way of synthesis of some active solid compounds |
{Koltsov1964} ru | Reaction of trichlorosilane with silica. |
{Koltsov1967} en ru | Interaction of titanium tetrachloride with silica gel |
{Sveshnikova1970} en ru | Formation of a silicon oxide layer of predetermined thickness on silicon by the molecular layering method |
{Sveshnikova1970b} en ru | Interaction of titanium tetrachloride with hydroxylated silicon surfaces |
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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust
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