On the "earlier ALD history activities" mentioned in the JVSTA focused ALD history review

As stated in the focused ALD history review recently published in the Journal of Vacuum Science and Technology A, the Virtual Project on the History of ALD (VPHA) "in essence, continues the earlier ALD history activities of one of the current authors, whose results were published in a review article in 2005."

In this post, I wish to tell more of the background of the earlier ALD history activities mentioned: how they started and what they were. The earlier history activities are related to my own doctoral thesis (2002) and the postdoctoral time after that.

Screen capture,  R. L. Puurunen's doctoral thesis at the Aalto University library server, access through http://lib.tkk.fi/Diss/2002/isbn9512261421/.

Microchemistry, Neste and Helsinki University of Technology - doctoral thesis

I made my Master's thesis in 1998 at Microchemistry, Espoo, Finland (nowadays part of ASM International), and continued for doctorate in 1999-2002 partly Neste and partly Helsinki University of Technology (HUT). Generalizing, the subject of my research was the surface modification of porous particles by atomic layer deposition for catalyst applications.