On the mammoth table - JAP 2005, JAP 2013 - next step VPHA?

The "mammoth table" of two-reactant ALD processes that many ALD researchers will have seen, was created for Puurunen's JAP 2005 review (open access here), and updated for the Miikkulainen et al. JAP 2013 review (open access here).

An idea has come up that it might be possible to update the table again within the Virtual Project on the History of ALD (VPHA). No promises yet---just an idea.

Screen capture of the first rows of the updated "mammoth table" spanning over 17 pages. Reprinted from V. Miikkulainen, M. Leskelä, M. Ritala, R. L. Puurunen, J. Appl. Phys. 113 (2013) 021301, http://dx.doi.org/10.1063/1.4757907, with the permission of AIP Publishing.

With the view of possibly updating the mammoth table, this post describes how the mammoth table was originally created and how it has been once updated. Whether or not an update will be made within VPHA, the background information shared here should be useful regarding an update that eventually at some point in some form most likely will be made. A previous post on the unique article codes used in VPHA is related to this post and the mammoth table: the unique coding was already started for the JAP 2005 review and re-used in the Miikkulainen et al. JAP 2013 review as well as in VPHA's ALD-history-evolving-file. If/when an update to the mammoth table will be made within VPHA, the unique article codes will be used again.

ALD surface chemistry review and the mammoth table - Puurunen, JAP 2005

The mammoth table aims to summarize all two-reactant ALD processes developed by a given timeline. The table was first created for the JAP 2005 review.

When writing the JAP 2005 review, I had a vision to try to write the kind of review article which I hoped would have been available when I started with ALD in 1998.

Photos from HERALD WG2 / ALDCoE Helsinki workshop

We had a very fine HERALD/ALDCoE workshop in Helsinki early this week. About ninety people were present from four continents. Excellent invited talks were delivered e.g. by:

• Prof. Marc Heyns, IMEC, Belgium, 
• Dr. Simon Rushworth, EpiValence, UK
• Dr. Paul Williams, Pegasus Chemicals, UK
• Dr. David C. Smith, LAM Research, USA 
• Prof. Christophe Detavernier, Ghent University, Belgium
• Prof. Anjana Devi, Ruhr University Bochum, Germany
• Prof. Jaan Aarik,  University of Tartu, Estonia
• Prof. Erwin Kessels, Eindhoven University of Technology, The Netherlands

Thank you for all invited speakers and participants, as well as the organizers, especially Prof Markku Leskelä, the head of ALDCoE and the chairman of this event, and Dr. Ville Miikkulainen, who is the coordinator or ALDCoE and who was the main practical organizer of the event.

Riikka Puurunen pitching the VPHA organizational poster. Photo by Oili Ylivaara (Twitter via @rlpuu)

Some photos from the event are collected below, published in Twitter by Riikka Puurunen (@rlpuu), Oili Ylivaara (@ltoili), Pegasus Chemicals (@PegasusChemical) and in LinkedIn by Simon Rushworth. A collection of earlier VPHA-related travel reports published in the ALD History Blog can be found here.