The 16th International Conference on Atomic Layer Deposition ALD2016 (http://www.ald2016.ie), including the 3rd International Workshop on Atomic Layer Etching, was organized in Dublin, Ireland, July 24-27, 2016. I had a pleasure to participate at the conference as a speaker, poster presenter, and as an International Programme Committee member. This blog post shares my travel notes from conference, thereby continuing my series on travel notes first written for the ALD Russia 2015 workshop and thereafter for Baltic ALD 2015, my St Petersburg visit Nov 2015, and HERALD Helsinki seminar May 2016.
|ALD 2016 conference chairs Simon Elliott and Jonas Sundqvist. Photo from Twitter, @jv3sund.|
ALD 2016 Ireland was co-chaired by Dr. Simon Elliott (Tyndall National Institute, Ireland) and Dr. Jonas Sundqvist (Lund University, Sweden). Invited/plenary speakers at the ALD conference were: Raymond Adomaitis (University of Maryland, USA), Robert Clark (TEL America, USA), Byung Joon Choi (Seoul National University of Science and Technology, Korea), Mike Cooke (Oxford Instruments, UK), Jolien Dendooven (University of Ghent, Belgium), Michael Gros-Jean (STMicroelectronics, France), Joseph Hupp (Northwestern University, Illinois, USA), Ying-Bing Jian (University of New Mexico / Angstrom Thin Film Technologies LLC, USA), John Langan (Air Products, California, USA), Anatoly Malygin (St. Petersburg State Technological Institute, Russia), Yongfeng Mei (Fudan University, China), and Lars Samuelson (Lund University, Sweden). Before the actual conference, on Sunday, a tutorial session was organized. Speakers were: Sumit Agarwal (Colorado School of Mines, USA), Sean Barry (Carleton University, Canada), Annelies Delabie (IMEC, KU Leuven), Keren Kanarik (LAM Research), Fred Roozeboom (TU Eindhoven, The Netherlands), Massimo Tallarida (Alba, Spain), and Stephan Wege (plasway-technologies, Germany). Invited/plenary speakers at the ALE workshop were: Ankur Agarwal (Applied Materials, USA), Steven George (University of Colorado, Boulder), Akira Koshiishi (Tokyo Electron), Dennis van Dorp (IMEC), Kazunori Shinoda (Hitachi Hi-Tech).
Espoo, June 31, 2016
Updates to the travel report made after initial publishing, July 30.
- Aug 1, 2016. ALE workshop invited speakers added to the list of invited speakers.
- Aug 14, 2016. Note added of the invited talk by Drozd at the Baltic ALD 2014 conference in Helsinki.
- Aug 27, 2016. Photo of Keren Kanarik tutorial added. Signature added (originally forgotten).
- Aug 28, 2016. Addition regarding Suvi Haukka's prize: "(Update 28.8.2016: More regarding the prize in a separate ALD History Blog post and a follow-up post in "Ed's Threads" at http://semimd.com/blogs/.)"
|Empty terminal in HEL airport. Time to work for a while before flight to Dublin #ALD2016 conference leaves. Riikka Puurunen @rlpuu in Twitter.|
|She wheeled her wheel-barrow,
Through streets broad and narrow ...
Happy to meet Molly Malone in #Dublin :) #ALD2016. @rlpuu in Twitter. Photo by Riikka Puurunen. |
|Finally! Prof Anatoly Malygin from #StPetersburg, 1st author of "ML-#ALDep" essay, among #ALD2016 invited speakers. Riikka Puurunen @rlpuu in Twitter.|
|Had a look at the programme during the flight... Plasma-mystery at P-02-016 on Tuesday evening! #ALD2016. Riikka Puurunen @rlpuu in Twitter|
|#ALD2016 #ALDep conference bag contents. Many sponsors! @ALD2016_Ireland. Riikka Puurunen @rlpuu in Twitter.|
|Full house at the excellent tutorial session of #ALD2016 conference. Must be >300 people present. #ALDep Riikka Puurunen @rlpuu in Twitter.|
|One more photo, #ALD2016: Keren Kanarik @LamResearch, co-chair of #ALE2017, giving the excellent #ALEtch tutorial. Riikka Puurunen @rlpuu in Twitter (posted 22.8.2016)|
|Great tutorial on complicated #ALDep reactant development by @sean_t_barry @barrylab at #ALD2016. @ALD2016_Ireland. Riikka Puurunen @rlpuu in Twitter.|
|Get-together #ALD2016 at Guinness Storehouse with good food&company and live-played Molly Malone as farewell song :). Riikka Puurunen @rlpuu in Twitter|
|As if the entrance would be on the wrong side... Left-sided traffic at #ALD2016 Ireland. Riikka Puurunen @rlpuu in Twitter.|
|#VPHA #ALDhistory poster is up at #ALD2016 Ireland. P01-001. Pitch to come about 15:45 - follow in Twitter. #ALDep. Riikka Puurunen @rlpuu in Twitter.|
|Opening of #ALD2016 by Kieran Drain CEO Tyndall National Institute @ALD2016_Ireland @jv3sund @Simon_D_Elliott #ALDep. Riikka Puurunen @rlpuu in Twitter.|
|Gregory Parsons describing the person soon to get the ALD Innovation Prize. Photo by Riikka Puurunen.|
|Greg Parsons handing Suvi Haukka the ALD innovation prize. Photo by Riikka Puurunen. @rlpuu in Twitter: #ALDep innovation price to Dr Suvi Haukka, now at ASM, earlier Microchemistry with #Suntola. Well deserved! #ALD2016.|
|Gregory Parsons introduces the plenary speaker, Prof Anatoly Malygin, whom he first met at ALD Russia 2015. Photo by Riikka Puurunen.|
|On stage: plenary talk, Anatoly Malygin, St. Petersburg. Photo by Riikka Puurunen. @rlpuu in Twitter: At #ALD2016: invited speaker Prof Anatoly Malygin. Humidity indicators, gas permeation barriers, catalysts... #ALDep.|
|Robert Clark, TEL America. Photo by Riikka Puurunen. @rlpuu in Twitter: At #ALD2016: excellent invited talk by Robert D Clark, TEL, about the scaling of "atomic scale technology" #ALDep|
|.@rayadomaitis gave an interesting yet complex invited talk on chemical kinetics & modelling. #ALDep #ALD2016. Riikka Puurunen @rlpuu in Twitter|
|Great talk by @hacp81 at #ALD2016 on InN deposition by #ALDep / #CVDep with @sean_t_barry's chemicals. Riikka Puurunen @rlpuu in Twitter.|
|Matti Putkonen from @VTTFinland: #ALDep for fuel cells utilising fiber matts #ALD2016. Riikka Puurunen @rlpuu in Twitter.|
|The Finnish Salty Licorice bar at Finnish Special Glass at the @ALD2016_Ireland exhibition - just awesome! #ALD2016. Henrik Pedersen @hacp81 in Twitter.|
|This is another face of Dublin. Photo by Riikka Puurunen.|
|Place a lid to your coffee cup before stepping on the escalator! This I will remember from ALD 2016 Ireland for sure :). Photo by Riikka Puurunen|
|A view on Wendesday at the exhibition hall after the posters have left. Photo by Riikka Puurunen.|
|Suddenly I understand why the flowers look so good in #Dublin. They get water every day... (On the way to hotel). Riikka Puurunen @rlpuu in Twitter|
|A view from the hotel window. These beasts are no Pokemons! Photo by Riikka Puurunen|
|Jouni Ahopelto presented the @VTTFinland poster on record-conformal #ALDep TiN at #ALD2016. Tested with PillarHall(R). Riikka Puurunen @rlpuu in Twitter.|
|Nice talk on stress in #ALDep AlN films by @rlpuu and @VTTFinland . Important area for future research. #ALD2016. Henrik Pedersen @hacp81 in Twitter.|
|Oili Ylivaara @VTTFinland had one of the last talks at the #ALD2016 conference, on #ALDep thin film residual stress. Riikka Puurunen @rlpuu in Twitter.|
|ALD professors from St Petersburg in the audience: Anatoly Malygin and Vladimir Smirnov. Co-authors in the "ML essay" (Chem. Vap. Deposition 21 (2015) 216-240) and "Early work on atomic layer deposition cited" (Solid State Technology, 2002, March, p. 14). Photo by Riikka Puurunen.|
|Excellent local Irish entertainment at the #ALD2016 gala dinner: Riverdance. Riikka Puurunen @rlpuu in Twitter.|
|Marissa Kerrigan @waynestate: best highlight talk as voted by attendees. #ALDep precursor chemistry. #ALD2016. Riikka Puurunen @rlpuu in Twitter|
|Here is one #HappyALD pic: the tweeting king @hacp81 and #ALDToughGirls before the prize. # credit @BMCtheALCHEMIST Riikka Puurunen @rlpuu in Twitter.|
|Prize for the best tweet at #ALD2016 goes to ... Henrik Pedersen @hacp81! Riikka Puurunen @rlpuu in Twitter|
|Stage time for the chairs of next year: Chuck Dezelah and John Conley. Photo by Riikka Puurunen.|
|Dublin and the Convention Centre by night. Photo by Riikka Puurunen.|
|Ireland from the air. Photo by Riikka Puurunen.|
|Finland from the air: woods, lakes, and a river. Some houses, too. Photo by Riikka Puurunen.|
|My name was written all correctly this time. Thanks! Photo by Riikka Puurunen.|
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