Millennium Technology Prize to Tuomo Suntola - photos Millennium Talks May 23, 2018

In the an earlier post, photos were shared from the Millennium Technology Prize Gala on May 22, 2018, where Tuomo Suntola received the prize for atomic layer deposition technology.  This post continues from where the previous post (Feb 10) left, and shares photos from the open lecture that Suntola gave on May 23, 2018, at Aalto University.

What is atomic layer deposition (ALD)? The 2018 Millennium Technology Prize winner Tuomo Suntola explains the contents of the lecture to come. (Photo: Riikka Puurunen, 23.5.2018)

Story of the image: Reconstruction of the first Atomic Layer Epitaxy experiment

On December 6th, 2018, I have made a small donation to the world. I uploaded the image, which shows a reconstruction of the first Atomic Layer Epitaxy experiment (nowadays Atomic Layer Deposition) in Wikimedia Commons. (I also created a new gallery, Tuomo Suntola.)

The image is shared in Wikimedia Commons with the Creative Commons Attribute-Share Alike license (CC BY SA 4.0). This means that anyone in the world is free to use the image, also in commercial works, without the need to ask for further permission. The licence requires that one acknowledges the source (BY) and if edits are made, they are shared with a similar licence (SA). Ok ways in my view to acknowledge the source are: 

1. Noting the authors & licence: Riikka Puurunen & Tuomo Suntola 2014 (CC BY-SA 4.0) 
2. linking to the Wikimedia page https://commons.wikimedia.org/wiki/File:Reconstruction_of_the_first_atomic_layer_epitaxy_experiment_by_Tuomo_Suntola.jpg. 

This image is quite special in my view and it was quite an effort to make it, so I am happy it is now shared for anyone's further use. (If someone is interested, I can tell another time, how it was made.) Had the image been used in the way it was first intended, it would not have been possible to share it in Wikimedia Commons. Luckily, things don't always go as planned. 

Here, I want to tell the story of this Suntola image, as an example to perhaps learn from.

ALD history at ALD 2016 Ireland

Prof Greg Parsons introducing Prof Anatoly Malygin to give a plenary talk at ALD 2016. Photo by Riikka Puurunen.

The ALD 2016 conference was a major step forward in advancing the understanding of the worldwide history of Atomic Layer Deposition (ALD). Progress took place at least in three ways:

1. Prof. Anatoly Malygin (St. Petersburg State Technological Institute (Technical University)) delivered an invited talk. ALD 2016 was the first time ever that a person representing the branch of ALD of "old Russian works" has presented a talk at the international ALD conferences. Great thanks Prof. Malygin delivering the talk as well as for the conference chairs Dr. Simon Elliott and Dr. Jonas Sundqvist for inviting him.

Photos from HERALD WG2 / ALDCoE Helsinki workshop

We had a very fine HERALD/ALDCoE workshop in Helsinki early this week. About ninety people were present from four continents. Excellent invited talks were delivered e.g. by:

• Prof. Marc Heyns, IMEC, Belgium, 
• Dr. Simon Rushworth, EpiValence, UK
• Dr. Paul Williams, Pegasus Chemicals, UK
• Dr. David C. Smith, LAM Research, USA 
• Prof. Christophe Detavernier, Ghent University, Belgium
• Prof. Anjana Devi, Ruhr University Bochum, Germany
• Prof. Jaan Aarik,  University of Tartu, Estonia
• Prof. Erwin Kessels, Eindhoven University of Technology, The Netherlands

Thank you for all invited speakers and participants, as well as the organizers, especially Prof Markku Leskelä, the head of ALDCoE and the chairman of this event, and Dr. Ville Miikkulainen, who is the coordinator or ALDCoE and who was the main practical organizer of the event.

Riikka Puurunen pitching the VPHA organizational poster. Photo by Oili Ylivaara (Twitter via @rlpuu)

Some photos from the event are collected below, published in Twitter by Riikka Puurunen (@rlpuu), Oili Ylivaara (@ltoili), Pegasus Chemicals (@PegasusChemical) and in LinkedIn by Simon Rushworth. A collection of earlier VPHA-related travel reports published in the ALD History Blog can be found here.

VPHA HERALD Helsinki presentation files in vph-ald.com

Next week, the Finnish Centre of Excellence on Atomic Layer Deposition (ALDCoE) will organize a HERALD COST Action MP1402 workshop "ALD precursors and processes" in Helsinki (May 23-24). There will be top-class invited speakers, such as Prof. Jaan Aarik (University of Tartu), Prof. Christophe Detavernier (Ghent University), Prof. Erwin Kessels (Eindhoven University of Technology), Prof. Marc Heyns (IMEC), and Dr. Dennis Hausmann (LAM Research) --- access the full list at http://www.aldcoe.fi/herald/index.html.

ALDCoE participants and other ALD players in Finland will present their work in posters at the event, with associated 1-min 1-slide introductory talks. VPHA will have an organizational poster at the event: "Virtual project on the history of ALD: overview and current status." You can access the abstract, poster and one-slider through the VPHA webpage, http://vph-ald.com/ALD-history-publications.html, which contains a collection of references and links to significant publications dealing with the history of ALD. (If you notice that there is an ALD history -related publication missing in this page, please let us know, e.g. by emailing info@ vph-ald.com.)

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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust

VPHA status update 2016-05-16

 The status update below was sent to 63 co-authors and 30 prospective co-authors.

 --- 

Dear VPHA co-authors and prospective co-authors,

VPHA has progressed significantly during the past weeks. Here, you find an update on the following topics:

1. VPHA reading progress – Next check June 8
2. VPHA voting for conclusive recommended reading list, ALD 2016 poster: DL June 15
3. VPHA ALD History Review reminder
4. VPHA organisational poster at Helsinki ALDCoE/HERALD workshop
5. A comment without name in ALD-history-evolving-file
6. ALD-history-evolving-file how-to: Please preferably copy-paste instead of writing in the file directly
7. Other ALD History blog posts 

The previous update was sent on April 29th; you can access earlier updates collectively in this link.

Finnish Seminar (TENK) on Research Integrity

The Finnish Advisory Board on Research Integrity (Tutkimuseettinen neuvottelukunta, TENK, http://www.tenk.fi/) organized on May 9 a seminar (in Finnish) "Vilppiä vai ei? Tutkimuseettinen seminaari". The seminar was very actual, as in Finland there has been lively---and good---discussion about research ethics in the recent months. It all started from an article in Helsingin Sanomat (7.2.) (see also Aivelo's science blog and Retraction watch).  I was happy to attend this event and to learn from the TENK representatives and e.g. from the insightful views shared by the rector of Aalto University, Tuula Teeri.

The guidelines of TENK, drawn up by the research community, have been signed by all Finnish universities as well as by research organizations such as my employer, VTT. One can view the TENK guidelines online; paper copies are provided upon request. The TENK webpages link also to several useful instructions, including international guidelines regarding research integrity, see http://www.tenk.fi/fi/ohjeet-ja-julkaisut.

• Hyvä tieteellinen käytäntö ja sen loukkausepäilyjen käsitteleminen Suomessa
• The Advisory Board's guidelines for responsible conduct of research
• http://www.tenk.fi/sv/arkiv/de-nya-forskningsetiska-anvisningar-och-modell-till-meritförteckning 

I have read these these guidelines several times, before and during VPHA. I recommend these or similar guidelines as essential reading for every scientist, in Finland and elsewhere.

Below is the programme of the event and some photos taken by me (Riikka Puurunen). Some of the photos have been published in Twitter (@rlpuu, hashtag #HTK-seminaari).

VPHA status update 2016-04-29

 The status update below was sent to 54 co-authors and 35 prospective co-authors.

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Dear VPHA co-authors and prospective co-authors,

About a month has passed since the previous status update on March 31. It is a good time to stop again and see what has been the progress of last month. You can access previous updates in this link. This status update contains information on the following topics:

1 VPHA reading for ALD 2016 Dublin

2 LinkedIn ALD terminology discussion: GPC

3 ALD conference list

4 VPHA organizational poster in the HERALD Helsinki meeting

5 ALD History Blog statistics after half a year of the blog

Organizational presentation abstract of VPHA, Helsinki, May 23-24

The abstract of the organizational poster of VPHA, "Virtual Project on the History of ALD: overview and current status" has been finalized and submitted to the combined HERALD Working group 2 workshop and 4th annual seminar of ALDCoE "ALD precursors and processes", May 23-24, 2016, Helsinki, Finland, organized by the Finnish Centre of Excellence in Atomic Layer Deposition.

The abstract can be accessed in full here: http://vph-ald.com/VPHApublications/2016MayHelsinki_VPHA-Puurunen-et-al_2016-04-28_FINAL.pdf . The abstract text is copied below.

VPHA correspondence: Organizational poster in Helsinki, pls check thanks by 27.4.

The email below was sent to 53 VPHA co-authors and 34 prospective co-authors.

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Dear VPHA authors and prospective co-authors,

A combined HERALD Working group 2 workshop and 4th annual seminar of ALDCoE "ALD precursors and processes" will be organized May 23-24 in Helsinki, see http://www.aldcoe.fi/herald/index.html.

As one of the organizers, I will naturally participate this event. There will be many posters by local ALD scientist. It should be good to present an overview the progress of VPHA at this event, so we plan to send in an organizational VPHA poster, similarly as we did at Baltic ALD in Tartu. A draft of the related abstract is attached to this email. <attachment not included in this ALD History Blog post>

In the Acknowledgements section, we would like to extend thanks to all VPHA participants. Please have a look at this section and let me know if you see your name missing or incorrectly spelled, or if you see other needs for revision. Please send me your requests for change latest on Wednesday, April 27.

The VPHA reading progresses nicely again, this you see e.g. from the graph included in a recent ALD History Blog post: http://aldhistory.blogspot.fi/2016/04/vpha-reading-proceeds-now-44percent-completed.html If there are new people who give their first comments in the ALD-history-evolving-file by April 27, we will update the acknowledgements with their names.

Best regards,

Riikka, VPHA coordinator

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Riikka Puurunen (Dr.), Senior Scientist, Microsystems and Nanoelectronics; Project Manager (IPMA C)

VTT Technical Research Centre of Finland, Tietotie 3, Espoo (P.O. Box 1000), FI-02044 Espoo (VTT), Finland

< >, www.vttresearch.com, www.aldcoe.fi

fi.linkedin.com/in/riikkapuurunen, vph-ald.com, aldhistory.blogspot.fi, twitter.com/rlpuu

*************** 

Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust

VPHA abstract submitted to Ireland ALD 2016: 51 authors

Abstract of the Virtual Project on the History of ALD (VPHA) --- item #9 in the publication plan --- was submitted to Ireland ALD 2016 conference, with 51 authors from 15 countries. (After the submission, one person has already joined, so now we are with 52.) The abstract text is copied in full below.

The work that now remains to do related to the ALD 2016 presentation is to (i) complete the VPHA reading and (ii) create a "conclusive recommended reading list" of the most important early publications and applications. Creating this list will be collaborative work, where all VPHA participants can equally influence the results. More to come on the selection method later---we will first have to decide how to do it.

Interestingly, the conference publishes short biographies of the invited speakers. Here you find links to the current VPHA co-authors who are also invited speakers at the conference: Prof. Anatolii Malygin, Prof. Fred Roozeboom, Dr. Massimo Tallarida.

--- VPHA abstract submitted to Ireland ALD 2016 ---

Nov 29: Story of a cover image, "Reconstruction of the first ALE experiment"

November 29, 2014, it was exactly 40 years since the filing of the first patent on Atomic Layer Epitaxy by Suntola and Antson (FIN 52359). To celebrate this, the Finnish Centre of Excellence on Atomic Layer Deposition (ALDCoE) released the material of the exhibition "40 Years of ALD in Finland - Photos, Stories" (FinALD40) in the internet. Originally, this exhibition had been created for the Baltic ALD 2014 conference in Helsinki, May 12-13, 2014.

Today, one year later, I want to tell you the story behind the cover image of the internet release of the the FinALD40 exhibition material. The cover image is called: "reconstruction of the first ALE experiment" and is shown in the next figure.

"Reconstruction of the first ALE experiment". © Riikka Puurunen 2014

BALD Engineering blogs about Tuomo Suntola's overview on ALD

Jonas Sundqvist from BALD Engineering has published a nice blog post discussing the ALD webpage of Dr. Tuomo Suntola, the Finnish inventor of ALD. See the full post at http://baldengineering.blogspot.de/2015/11/tuomo-suntola-overview-on-atomic-layer.html. In the words of Jonas Sundqvist:

"I think that we all today have to thank Suntola and his co-workers like Sven Lindfors < > and others for making all this possible. Just think about it - would we all today enjoy living and working in a fast growing technological field of ALD without this work  that started in the 70´s and persisted through until it went global in the 90´s and beyond until today?"