Friday, 8 March 2019

Millennium Technology Prize to Tuomo Suntola - photos Millennium Talks May 23, 2018

In the an earlier post, photos were shared from the Millennium Technology Prize Gala on May 22, 2018, where Tuomo Suntola received the prize for atomic layer deposition technology.  This post continues from where the previous post (Feb 10) left, and shares photos from the open lecture that Suntola gave on May 23, 2018, at Aalto University.

What is atomic layer deposition (ALD)? The 2018 Millennium Technology Prize winner Tuomo Suntola explains the contents of the lecture to come. (Photo: Riikka Puurunen, 23.5.2018)


The Millennium Talks lecture by Tuomo Suntola was organized at the main building of Aalto University - previously Helsinki University of Technology, where Suntola obtained his M.Sc. and doctoral degrees - in Otaniemi, Espoo, Finland. (Photo: Riikka Puurunen, 23.5.2018)s
The lecture was in the main building of Aalto University, Lecture hall A. (Photo: Riikka Puurunen, 23.5.2018)
Prof. Päivi Törmä opened the Millennium Talks lecture - the 2018 Millennium Technology Prize winner Tuomo Suntola gets on stage. (Photo: Riikka Puurunen, 23.5.2018)

What is atomic layer deposition (ALD)? The 2018 Millennium Technology Prize winner Tuomo Suntola explains the contents of the lecture to come. (Photo: Riikka Puurunen, 23.5.2018)

ALD processing window (or ALD window, in short): Tuomo Suntola explains this concept he developed in the 1980s and which is nowadays widely used in the field of ALD. (Related terminology discussion posts in ALD History Blog: post 1 and post 2.) (Photo: Riikka Puurunen, 23.5.2018)

The growth per cycle, GPC (or here: growth rate) does not necessarily have to be constant within the ALD (processing) window, according to Suntola. (Photo: Riikka Puurunen, 23.5.2018) 

Ten billion transistors per chip! ALD has enabled the continuation of Moore's law and the miniaturization of transistors to the level of today. (Photo: Riikka Puurunen, 23.5.2018) 
How did it all start? The inventor, Tuomo Suntola, tells his story himself. Some details have been shared in an open-access essay: https://doi.org/10.1002/cvde.201402012. (Photo: Riikka Puurunen, 23.5.2018)

Before ALD, Tuomo Suntola had invented the humidity sensor later commercialized by Vaisala (tradename HUMICAP). This invention was an important step towards ALD development, as because of it, Suntola was invited to the Instrumentarium company to "invent something". (Proto: Riikka Puurunen, 23.5.2018)

At Instrumentarium, Tuomo Suntola proposed to start making flat panel electroluminescent devices. The board did not understand much of the suggestion - the chairman nevertheless trusted and gave green light to go ahead. (Photo: Riikka Puurunen, 23.5.2018) 
The Periodic Table of the Elements served as inspiration for Tuomo Suntola to come up with the concept of ALD - originally named Atomic Layer Epitaxy by Suntola. (Photo: Riikka Puurunen, 23.5.2018)
Scheme of the first reactor presented by Tuomo Suntola - spatial ALD in 1974. See also the reconstruction of the first ALE experiment, where to this (stylised) reactor a silhouette photograph of Suntola was added - Wikimedia Commons. (Photo: Riikka Puurunen, 23.5.2018)  

Timeline of the electroluminescent devices, the first industrial application of ALD, as shared by the inventor Tuomo Suntola. (Photo: Riikka Puurunen, 23.5.2018)

The 1994 Materials Research Society (MRS) conference marked a milestone for ALD in the route towards industrial applications in microelectronics. More details in the open-access essay: https://doi.org/10.1002/cvde.201402012. (Photo: Riikka Puurunen, 23.5.2018)

For industrial applications, production-worthy reactors are necessary. (Photo: Riikka Puurunen, 23.5.2018)

Tuomo Suntola and ALD performance indicators, as compiled by BALD Engineering. (Photo: Riikka Puurunen, 23.5.2018)
Tuomo Suntola presenting ALD scientific activity via doctoral theses on ALD. This list originates from VPHA and has grown since; building of it continues when writing this post, see e.g. here. Info e.g. from Japan still missing. (Photo: Riikka Puurunen, 23.5.2018)
Tuomo Suntola presenting ALD scientific activity via ALD patents and publications, with covers of important ALD-related conferences shown. (Photo: Riikka Puurunen, 23.5.2018)
Tuomo Suntola highlighting the University of Helsinki group and Centre of Excellence on Atomic layer Deposition (ALDCoE). (Photo: Riikka Puurunen, 23.5.2018) 
Tuomo Suntola explaining Moore's law and how ALD has enabled its continuation since 2007. (Photo: Riikka Puurunen, 23.5.2018) 
Tuomo Suntola - author of recent book "The Short History of Science - or the long path to the union of metaphysics and empiricism" - discusses the timespan of developments. (Photo: Riikka Puurunen, 23.5.2018) 

Thanking the audience, too :) . (Photo: Riikka Puurunen, 23.5.2018)

Prof. Päivi Törmä and Tuomo Suntola at the end of the Millennium Talk. (Photo: Riikka Puurunen, 23.5.2018)

Time for questions from the audience - Millennium Talk by Tuomo Suntola. (Photo: Riikka Puurunen, 23.5.2018)

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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust

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