Thursday, 14 January 2016

ALD terminology discussion: ALD Window

"ALD window" (sometimes, ALD temperature window) is a term used widely in ALD literature.

Although this term is widely used and specific to ALD, rarely, an original source is pointed out.

Who created this term, and when? Can the first (public, written) record for this be tracked back? How was ALD Window originally defined and how did it look like? Nowadays, exactly how it is described, may tend to differ slightly from one source to the other.

I am asking, because by the time that we will write the ALD History Review (#10 in the VPHA Publication Plan, http://vph-ald.com/Publication%20Plan.html), we should know.


Let us discuss this in the ALD - Atomic Layer Deposition LinkedIn group in the discussion thread just initiated, https://www.linkedin.com/groups/1885076/1885076-6093349323704193027.

Initiation of discussion of terminology was proposed in the VPHA status update http://aldhistory.blogspot.fi/2015/12/vpha-status-update-2015-12-17.html. More terminology to be discussed is collected in the VPHA-ALD-terminology file, you find the link through the VPHA open files -page, http://vph-ald.com/VPHAopenfiles.html.

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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust




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