Saturday 9 January 2016

Historical ALD articles with one comment

Going though the table of historical ALD articles with no comments yet in VPHA (http://aldhistory.blogspot.fi/2016/01/historical-ald-articles-with-no-comments.html), I noticed that there are few publications for English-speakers to read. Likely >90% of the publications are in Russian. There are also theses in Finnish, and some publications in German and Bulgarian.

To facilitate the VPHA reading progress, it should be useful to point publications for English-speakers, too. So, I created another list of articles in ALD-history-evolving-file that at the moment have one comment. There are 157 such articles at the moment, listed below. Let's make some progress for these! The target is that, by the end of VPHA, each publication has at least three comments.


Please remember, you find a link to the VPHA-reading-overview-file and to the other working files of VPHA in http://vph-ald.com/VPHAopenfiles.html. 

{Aleskovskii1953} ruInvestigation of absorbents nature. Problems and methods of Chemical analysis
Von W StöberIn German: Chemische Adsorption von Methylchlorsilanen an kristallinem und amorphem Siliziumdioxyd
Koltsov "PhD" thesis 1962Investigation of interaction between CCl4 and SiO2
{Koltsov1967d} ruClassification of chemical transformations of macromolecular inorganic compounds
{Volkova1967} ruStudy of phosphorus trichloride reaction with silica gel
{Koltsov1968b} ruThe change of silica porosity by molecular layering method
{Volkova1968} ruThe study of stoichiometry of the products of multilayer chemisorption of PCl3 on silica gel
{Volkova1968a} ruInfluence of the degree of surface hydroxylation of silica gel on chemisorption of phosphorus trichloride
{Sveshnikova1968} ruStudy of the interaction between titanium tetrachloride and silicon
{Volkova1969b} ruReaction of PCl3 with silica gel
{Koltsov1969f} ruStudy of the interaction between titanium tetrachloride and silicon
{Koltsov1969g} ruChemical composition of products synthesized by sequential chemisorption of TiCl4 and PCl3 on silica
{Koltsov1969c} ruSynthesis of titanium and phosphorous oxides by varying number of titanium and phosphorous monolayers
{Koltsov1969d} ruInfluence of the underlying atoms on the activity of atoms on the surface
{Koltsov1969e} ruChanges in silica gel during the process of molecular layering of phosphorus pentoxide
{Smirnov1969} ruStudy of chemical activity of P2O5 synthesized by Molecular Layering method on the surface of silica
{Aleskovskii1969} ruStudy of sorption of water vapor by phosphorus containing silica
{Smirnov1969a} ruStudy of chemical activity of titanium dioxide deposited on silica by molecular layering technique
{Sveshnikova1969a} ruMeasuring thicknesses of ultra-thin silicon oxide films deposited by molecular layering on the surface of single crystal silicon using polarization method
{Volkova1969a} ruThe interaction of some chlorides with silica gel - molecular layering reactions. Ph.D. (kandidat nauk) thesis,
{Volkova1969} ruStudy of the interaction between phosphorus trichloride and silica gel
{Yates1969} enInfrared studies of the reactions between silica and trimethylaluminum
Murray1970The polymerization of propylene by the SiO2/TiCl4/AlMe3 system
{Koltsov1970h} ruThe effect of support on the properties of catalyst. 1
{Koltsov1970b} ruHomology of three dimensional inorganic polymers with globular type structure
{Koltsov1970c} ruRelation between structures of globular polymers and their chemical composition
{Koltsov1970d} ruPolymeranalogous transformation of three dimensional inorganic polymers
{Koltsov1970e} ruInterrelation between products of polymeranalogous reactions of three dimensional inorganic polymers
{Koltsov1970f} ruChange in supermolecular structure of globular inorganic polymers during the process of polymeranalogous transformations
{Koltsov1970g} ruThe interrelation between the heat of chemisorption and the location of functional groups on the surface of three dimensional inorganic polymers
{Rachkovskii1970a} ruStudy of the reaction of tin tetrachloride with silica gel
{Malygin1970} ruInteraction between phosphorous containing silica gel and ammonia
{Malygin1970a} ruStudy of the properties of reaction products between phosphorous containing silica gel and ammonia
{Sveshnikova1970a} ruSynthesis of a titanium oxide layer of predetermined thickness on monocrystalline silicon by the molecular layering method
{Koltsov1970a} ruEffect of the extent of silica dehydratation on the chemisorption mechanism of PCl3
{Koltsov1971} ru"the ML thesis": Synthesis of solids by the Molecular Layering Method
{Sveshnikova1971} ruSynthesis and study of thin oxide layers on the silicon surface
{Unger1971} gerFortschrittsberichte über Kolloide und Polymere
{Chien1971} enA study of surface structures of submicron metal oxide by vanadium tetrachlorlde as a paramagnetic probe
Hair & HertlReaction of hexamethyldisilazans with silica
{Sharygin1971} ru enChemisorption of tin tetrachloride on silica gel
{Volkova1971} ruReaction of phosphorus-containing silica with AgNO3
{Volkova1972} en ru Interaction between chromyl chloride and silica gel
{Kopylov1972} ruInteraction of aluminium chloride with silica
{Rachkovskii1972} ruSynthesis and study of thin oxide layers on the surface of single-crystal silicon
{Malygin1973b} enReaction of VOCl3 with hydroxilated surface of silica
{Koltsov1973a} ruStudy of the stability of thin titanium oxide films of various thicknesses on the surface of silica gel
{Koltsov1973b} ruThe effect of hydratation of silica on the mechanism of reaction between silica and aluminum chloride
{Koltsov1973} ru enEffect of the extent of surface hydroxylation of silica on the chemisorption of vanadium oxytrichloride.
{Volkova1973} en ruReaction of Phosphoryl chloride with hydrated silica
{Malygin1973a} ruThe interaction of vanadium , phosphorus, chromium oxychlorides with silica - reactions of the molecular layering:/ Diss . ... Candidate . Chem. Science
Smirnov thesisSynthesis and investigation of the activity of thin oxide layers on the surface of silica, Disc . ... Candidate . Chem. Science
{Bliznakov1974} ruSome morphological peculiarities of coatings deposited by molecular layering – single dimension model
{Smirnov1974a} ruRegarding the chemical activity of titanium containing silica
{Pak1974a} ruThe electronic spectrum of ultra thin titanium oxide films on the surface of quartz
{Koltsov1974} enChange in the structure of silica gel in the process of the formation of a layer of phosphorus pentoxide on its surface
{Eremeeva1974} en ruInvestigation of ultrathin SiO2 films on the surface of single-crystal germanium
{Petrov1975} ru Density of multilayer coatings formed as a result of reactions of molecular stratification - two-dimensional models
{Pak1975} en ruFormation of positive benzene ions on surface of titanium-containing and aluminum-containing silicas prepared by the molecular-coating method
{Pak1975b} en ruOptical spectra of silicas [and silica gel] in the range 200--400 nm
{Hanke1975} gerStudies on catalytically active surface compounds 1. Preparation and investigation of vanadium oxide phases on silica
{Damyanov1976b} ruPreparing metal oxide layers by a molecular surface deposition reaction. II. Porous structure of silica gel with deposited chromium oxides
{Damyanov1976c} ruPreparing metal oxide layers by a molecular deposition reaction. III IR spectra of modified with chromyl chloride silica gels
{Pak1976a} ruStructure of surface complexes obtained by reaction of VOCl3 with silica and aerosil
{Smirnov1976} ruEffect of the chemical composition of surface layer on the activity of oxide catalyst
{Koltsov1976a} ru en Investigation of degree of monocrystalline silicon surface hydration at different temperatures
{Koltsov1976b} en ruSynthesis and investigation of aluminum--oxygen layers on the surface of silica
{Malkov1976} ruEffect of modification of the surface of carbon fibers by titanium oxide groups on their reactivity
{Malygin1976} enOxidation--reduction reactions of phosphorus trichloride and vanadyl(V) chloride with vanadium(V)- and phosphorus(III)- containing silica gels
{Tretyakov1976} ruChemisorption of TiCl4 on the dehydroxylated samples of silica
{Stepanova1977} en ruStudy of the reaction between zinc chloride and silica gel
{Hanke1978a} gerZur Existenz unterschiedlicher Vanadium (V)-oxid-Oberflächenphasen auf SiO2 und ihre katalytischen Eigenschaften
{Koltsov1978} en ruStudy of aluminosilicate systems synthesized by the molecular-layering method
{Nechiporenko1978} en ruUltramicrochemical investigation of chromium oxide layers synthesized by molecular layering on single-crystal germanium and silicon surfaces
{Volkova1978} ruReaction of vinyl-containing silica with phosphorus (III) chloride
{Damyanov1979} enChanges in the porous spectrum of titanium-containing silica gels obtained by the molecular deposition method
{Malygin1979} enStudy of the properties of vanadium-containing silica gel
Morrow1979}Raman spectra of some hydrogen sequestering agents chemisorbed on silica
{Smirnov1979} enSynthesis of hydride functional groups on the surface of diamond
{Velikova1979} ru enThe TiCl4 with amorphous SiO2 interaction in the process of catalysts preparation by the molecular deposition method
{Suntola1980a} ruMethod and equipment for deposition of compound thin films [in Finnish], SF patent 57975, Feb 28, 1979
{Gordeev1980} enSynthesis of hydroxyl functional groups on the surface of diamond
{Koltsov1980} enStructural characteristics of chromium-containing silica gel prepared by molecular coating
{Kukharskaya1980} ruProtection of glass and quartz fibers by titanium oxide coatings
{Malygin1980} en ruChemical composition of silica containing chromium and phosphorus synthesized by the molecular-stratification method
Suntola & cotitle? article in "Sähkö", must be in Finnish
{Ezhovskii1980} ruA method of producing of an optical coating. Description of invention for the authorship certificate № 789452. Claimed: 04.12.78, Published 23.12.80
{Tsvetkova1980} ruInvestigation of titanium oxide coatings deposited on the glass microspheres
SuntolaAtomic Layer Epitaxy
{Vainshtein1981} ru enPossible quantative estimation of the reactivity of silanol groups on silica surface
{Kopylov1981} en ruSpectroscopic study of the interaction of an epoxy resin with the surface of glass fillers modified by molecular lamination
{Postnova1981} en ruThe protic acidity of titanium-containing silica gels obtained by molecular deposition in layers
{Smirnov1981} ruSynthesis by molecular stratification of titanium oxide layers on the surface of technical grade carbon
{Tanninen1981} enX-ray diffraction study of thin electroluminescent ZnS films grown by atomic layer epitaxy
{Pak1981} ruParticipation of adsorbed water in molecular stratification reactions
{Koltsov1981} ru Investigation of the electric-field influence on the synthesis of titanium-oxide layers on the surface of silicon of the method of molecular layer coating
{Ezhovskii1981} ruA method of manufacturing of capacitors with oxide dielectric. Description of invention for the author certificate № 890463. Claimed: 24.04.80. Published 15.12.81.
{Koltsov1982} ruInfluence of an electric-field on the structure of titanium-oxide layers
{Silanova1982} ru enSurface Reactions in the system Cu-Cu2O-CH3OH
{Gordeev1982c} ruTHE RECIPROCAL INFLUENCE OF FUNCTIONAL-GROUPS IN SUBSTITUTION-REACTIONS ON THE DIAMOND SURFACE
{Nechiporenko1982} enSurface activity of metals (Ni, Ti) in molecular stratification reactions
{Ivin1982} ruEffect of thermal treatment on structural-chemical reorganization of carbonized carbon fibers
{Malkov1982} ruInfluence of chlorine chemisorption on the thermooxidative destruction of carbon fibers
{Malygin1982a} ruInfluence of technological parameters on the synthesis of vanadium-containing silicas.
{Malygin1982} ruThe effect of vanadium-containing additives on thermal-oxidative stability and combustibility of polymeric materials
{Gordeev1982a} ruDiamond – vanadium (V) oxychloride : chemistry of interaction
{Nechiporenko1982b} ruSpectroscopic investigation of ultra-fine oxide layers deposited by molecular layering method on the surface of glass and single crystal silicium
{Tsvetkova1982b} ruPreparing of spheroplastics with improved properties
{Tsvetkova1982} enPreparation of titanium oxide coatings on sodium borosilicate glass surfaces by molecular layering and study of the stability of the products obtained in aqueous medium
Della Mussia J. P., title?
{Vainshtein1982} ruA method of metals preparing before gluing. Description of invention for the author certificate № 975771. Claimed: 16.07.81. Published 23.11.82
{Busse1983} enZERO-PHONON LINES IN ELECTRO-LUMINESCENCE AND PHOTO-LUMINESCENCE OF ZnS-Mn THIN-FILMS GROWN BY ATOMIC LAYER EPITAXY
{Malkov1983} ruEffect of conditions of chlorine chemisorption on the stability of carbon fibers in oxidative environments.
{Vainshtein1983} ruStudy of the interaction of methyldichlor silane with a silicon surface
{Tornqvist1983} enHOW THE ZnS-Mn LAYER THICKNESS CONTRIBUTES TO THE PERFORMANCE OF AC THIN-FILM EL-DEVICES GROWN BY ATOMIC LAYER EPITAXY (ALE)
{Drozd1983} ruStudy of some properties of oxide coatings prepared by molecular stratification on the surface of semiconductors
{Tanninen1983} enCOMPARATIVE-STUDY OF THE CRYSTAL PHASE, CRYSTALLITE SIZE AND MICROSTRAIN IN ELECTROLUMINESCENT ZnS-Mn FILMS GROWN BY ATOMIC LAYER EPITAXY AND ELECTRON-BEAM EVAPORATION
{Ezhovskii1983} ruA method of treatment of silicate supports surface. Description of invention for the author certificate № 988786. Claimed: 05.06.81. Published 15.01.83
{Paananen1984} enFirst Symposium on Atomic Layer Epitaxy (VTT Symposium 54)
{Pessa1984a} enResearch and development of thin film technology in Finland
{Antson1984} enCharacterization of electroluminescent thin film structures by analytical techniques
{Tuomi1984} enX-ray and optical studies of the formation of zinc sulfide thin films grown by atomic layer epitaxy
{Vulli1984} enPossibilities and plans to prepare cadmium-mercury-telluride (CMT) semiconductor thin films with MBE- and ALE-methods
{Hautojaervi1984} enThe use of slow positrons to study semiconductor surfaces and interfaces
{Motsenyat1984} ru enFormation and reactions of hydroxyl groups on polymide surface with titanium tetrachloride
{Ezhovskii1984} ru enFormation and structure of titanium-dioxide layers on the surface of tantalum
{Krasnobryzhii1984} ru enHydrolysis of titaniumchloride groups synthesized on the surface of technical carbon
{Pessa1984c}GROWTH OF Cd$_1-X$Mn$_X$Te FILMS WITH $0 x 0.9 $ BY ATOMIC LAYER EPITAXY
{Pessa1984b}Atomic layer epitaxy of CdTe on the polar (111)A and (111)B surfaces of CdTe substrates
{Pessa1984}Epitaxial growth and electronic structure of CdTe films
{Postnova1984a} ru enStudy of catalytic systems synthesized by the molecular layering method
{Tolmachev1984a} ruInvestigation of process for synthesizing ultrathin titanium-oxide layers in porous glass
Suntola, T., Atomic layer epitaxy, in “Extended Abstracts of the 16th Conference on Solid State Devices and Materials,” p. 647, Kobe, Japan (1984).
Jarmo I. Skarp,Combination film, in particular for thin film electroluminescent structures
{Bedair1985} enATOMIC LAYER EPITAXY OF III--V binary compounds
{Ellestad1985} enReactions of titanium tetrachloride with silica gel surfaces
{Herman1985} enSurface morphology of CdTe films grown on CdTe (111) substrates by atomic layer epitaxy
{Ivin1985} ruReaction of various carbon fibers with chlorine
{Lahtinen1985}EFFECT OF GROWTH TEMPERATURE ON THE ELECTRONIC-ENERGY BAND AND CRYSTAL-STRUCTURE OF ZnS THIN-FILMS GROWN USING ATOMIC LAYER EPITAXY
{Miroshnichenko1985} en ruThermal oxidation of silicon carbide with surface modification by the molecular layering method
{Oikkonen1985}X-ray diffraction study of microstructure in ZnS thin films grown from zinc acetate by atomic layer epitaxy
{Suntola1985} enAtomic layer epitaxy
{Vainshtein1985} ru enRearrangement reactions on the surface of modified silicas
{Ezhovskii1985} ru enChemical Preparation of Silicon and Titanium Oxides
{Anikeev1986} ru enChemical deposition of layers of aluminium oxide on silicon
{Brykalov1986} en ruThe acidic properties of silochrom S-120 coated with various oxides by molecular layering
{Tsvetkova1986} ru enThe durability of glass microspheres coated by ultrathin element oxide coatings.
{Herman1986b} enGrowth mechanism in atomic layer epitaxy. 2. A model of the growth process of CdTe on CdTe(111) substrates
{Herman1986c} enGrowth mechanism in atomic layer epitaxy. 1. RE-EVAPORATION OF Cd AND Te FROM CdTe(111) SURFACES MONITORED BY AUGER-ELECTRON SPECTROSCOPY
{Herman1986} enMolecular layer epitaxy
{Horikoshi1986} enLOW-TEMPERATURE GROWTH OF GaAs AND AlAs--GaAs QUANTUM-WELL LAYERS BY MODIFIED MOLECULAR-BEAM EPITAXY
{Petrova1986a} ru enReaction Of TiCl4 And H2O Vapor Products With A Mica Surface
{Tammenmaa1986} enZINC-SULFIDE THIN-FILMS DOPED WITH RARE-EARTH IONS
{Tischler1986c} enUltrathin InAs/GaAs single quantum well structures grown by atomic layer epitaxy
{Usui1986}GaAs atomic layer epitaxy by hydride VPE
{Yao1986b} enDynamic Reflection High-Energy Electron Diffraction Observations of the Atomic Layer Epitaxy Growth of Zn Chalcogenides
{Yao1986d} enPhotoluminescence properties of ZnSe single crystalline films grown by atomic layer epitaxy

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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust


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