Everyone uses term "Atomic Layer Deposition (ALD)" nowadays, but this is not how the technique was invented. Originally, the technology was called Atomic Layer Epitaxy (in Finland) and Molecular Layering - or actually, Molekulyarnoe Naslaivanie (in Russia).
What is the first documented use of the term ALD? I am asking, because I don't know --- not yet. By the time of writing the "ALD History Review" (number 10 in the VPHA Publication Plan), we should know. Preparations for the review are now just starting, and more co-authors are welcome, as are also for the VPHA presentation at Ireland ALD 2016.
We plan also to discuss other terminology in the ALD History Review. Terminology to be discussed is collected in VPHA-ALD-terminology file, link here, where people can make their additions. More info on VPHA at http://vph-ald.com.
Initiation of discussion of terminology was proposed in the VPHA status update http://aldhistory.blogspot.fi/2015/12/vpha-status-update-2015-12-17.html. The LinkedIn ALD - Atomic Layer Deposition group may be a good place to carry out this discussion, as that gathers more than 3000 people together who have an interest in ALD. This same question was indeed presented there, earlier this day. If you are not yet a member of the group, please join! You can of course also leave a comment below.
Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust