Thursday 19 May 2016

VPHA HERALD Helsinki presentation files in

Next week, the Finnish Centre of Excellence on Atomic Layer Deposition (ALDCoE) will organize a HERALD COST Action MP1402 workshop "ALD precursors and processes" in Helsinki (May 23-24). There will be top-class invited speakers, such as Prof. Jaan Aarik (University of Tartu), Prof. Christophe Detavernier (Ghent University), Prof. Erwin Kessels (Eindhoven University of Technology), Prof. Marc Heyns (IMEC), and Dr. Dennis Hausmann (LAM Research) --- access the full list at

ALDCoE participants and other ALD players in Finland will present their work in posters at the event, with associated 1-min 1-slide introductory talks. VPHA will have an organizational poster at the event: "Virtual project on the history of ALD: overview and current status." You can access the abstract, poster and one-slider through the VPHA webpage,, which contains a collection of references and links to significant publications dealing with the history of ALD. (If you notice that there is an ALD history -related publication missing in this page, please let us know, e.g. by emailing info@

Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust

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