The abstract can be accessed in full here: http://vph-ald.com/VPHApublications/2016MayHelsinki_VPHA-Puurunen-et-al_2016-04-28_FINAL.pdf . The abstract text is copied below.
"Atomic
Layer Deposition (ALD), based on the repeated,
self-terminating gas—solid reactions of at least two gaseous compounds on a
solid substrate, has become a disruptive key enabling materials manufacturing
method. By its inventors, this method was given the name Molecular
Layering (1960s, Soviet Union) and Atomic
Layer Epitaxy (1970s, Finland). While the
original names still live on, gradually since the 1990s, “ALD” has evolved to
be the mostly commonly used name for the technique.
Virtual Project on the
History of ALD (VPHA) was set up in summer 2013
as an open effort, in which volunteered scientists from all around the world
work together in an atmosphere of openness, respect and trust to better
understand the early days of ALD. VPHA has already resulted in joint
publications, a tutorial, two essays, an exhibition, Wikipedia
updates, and a blog; see http://vph-ald.com
and VPHA
publication plan for details.
As
of April 2016, VPHA takes a next leap. The plan is to complete the central work
during summer 2016, namely the listing, reading and commenting on early ALD
works (there are over 300 ALD publications to read up to year 1986); and create
a joint
poster to ALD 2016 in
Dublin. A review is also being planned, with summaries of theses, conferences,
and reviews.
With
this abstract at the HERALD
Working
group 2 workshop and 4th annual seminar
of ALDCoE
"ALD precursors and processes”, we invite more voluntary contributors to
join the VPHA. People from all backgrounds and skills are warmly welcome to
contribute. "
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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust
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