Thursday, 21 July 2016

Early ALD publications with zero comments - VPHA welcomes more volunteers

The ALD History Project VPHA has progressed well during the first half of 2016, see e.g. the poster to be presented at ALD 2016 Ireland next week. The work is not competed yet, however: e.g., we have 16 early ALD publications which have no "VPHA comments" yet and the overall reading progress status is 67%.  

The table below shows all 16 publications listed in ALD-history-evolving-file with zero comments. The list includes publications in Bulgarian, English, German, Japanese, and Russian. The list clearly contains some historically important paper, for example:

  • publication by Pakkanen and Lindblad (in English), likely to be the very first density functional theory approach for ALD chemistry; and 
  • publication by Jun-ichi Nishizawa (in Japanese), likely to be the very first ALD/ALE paper from Japan. 

We will organize one more reading-distribution round in VPHA, to get the early ALD publications (up to 1986) read and commented. Target is that all publications should be commented by three people; one comment per publication is the absolute minimum. After the completion of the reading, we plan to re-open the voting to refine the recommended reading list, the first version of which is published in the ALD 2016 poster (voting will be re-opened open maximum for some weeks). More volunteers are still welcome to join the ALD history reading&voting, to help us complete the work. If you'd like to volunteer, please contact us e.g. through emailing info@ 

At ALD 2016 Ireland, there will be many VPHA volunteers around. The final VPHA poster co-author and affiliation list can be found at the end of this post. The co-author lists includes e.g. the conference chairs, several invited speakers, and some leading professors.

Publications with zero comments in ALD-history-evolving-file, as of July 21, 2016:
(bookkeeping in the VPHA-reading-overview-file)

{Smirnova1964} ruSynthesis of Mg-silicagels and Mg-Alumosilicagels and their sorption characteristics
{Pak1977} ruStructural effects of silica surfaces on molecularly superposed titanium-oxygen layers
KoltsovMolecular layering of carbon on the silica adsorbents with different pore structure
{Damyanov1978}Damyanov D., M. Velikova, Proc. II-nd Nat. Conf. "Neft i Himiya", Burgas, 4-6 X 1978, b. 1, p. 25 (in Bulgarian)
{Damyanov1978a}Damyanov D., Iv. Ivanov, Proc. II-nd Nat. Conf. "Neft i Himiya", Burgas, 4-6 X 1978, b. 1, p. 209 (in Bulgarian)
{Smirnov1979a} ruStudy of chemical and absorption-structural changes on the surface of carbon during molecular stratification of titanium hydroxy groups
{Damyanov1979b} enEthylene polymerization with a supported vanadium catalyst obtained by the molecular deposition method
{Jerschkewitz1981} gerZur Oberflächenchemie des Aerosil
{Sayzev1981} gerKatalytische Eigenschaften von Vanadiumoxide-Chromoxid-Aufschicht-Katalysatoren. Untersuchungen an katalytisch aktiven Oberflächenverbindungen.
{Tsvetkova1982a} ruSynthesis with use of molecular layering method of vanadium-containing glass microspheres and investigation of their properties
{Shevchenko1982} ruNew moisture scavengers based on the filled polymers.
{Damyanov1982} enCumene hydroperoxide decomposition in the presence of metal complex catalysts supported on amorphous SiO2.
{Pakkanen1983} enDensity Matrix Approximations for Molecular and Surface Studies
{Damyanov1983a} enSynthesis and properties of Pt-Sn/Al2O3 catalysts by the method of molecular deposition.
{Sushko1983} ruStudy of structural transformations in titanium-containing silicas
{Nishizawa1984} jpnCrystal Growth by Atomic Layer Epitaxy


On the early history of atomic layer deposition: most significant works and applications

Jaan Aarik,1 Esko Ahvenniemi,2 Andrew R. Akbashev,3 Saima Ali,2 Mikhael Bechelany,4 Maria Berdova,2 Stefan Boyadjiev,5 David Cameron,6 Nikolai Chekurov,7 Mikhail Chubarov,8 Veronique Cremers,9 Anjana Devi,10 Viktor Drozd,11 Simon Elliott,12 Liliya Elnikova,13 Gloria Gottardi,14 Kestutis Grigoras,15 Dennis Hausmann,16 Cheol Seong Hwang,17 Marcel Junige,18 Shih-Hui Jen,19 Tanja Kallio,2 Jaana Kanervo,2 Ivan Khmelnitskiy,20 Do Han Kim,21 Lev Klibanov,22 Yury Koshtyal,23 Outi Krause,2 Jakob Kuhs,9 Irina Kärkkänen,24 Marja-Leena Kääriäinen,25 Tommi Kääriäinen,25 Luca Lamagna,26 Adam Lapicki,27 Markku Leskelä,28 Harri Lipsanen,2 Jussi Lyytinen,2 Anatoly Malkov,29 Anatoly Malygin,29 Christian Militzer,30 Jyrki Molarius,15 Małgorzata Norek,31 Cagla Ozgit-Akgun,32 Mikhail Panov,20 Henrik Pedersen,33 Luis Fabián Peña,34 Fabien Piallat,35 Georgi Popov,28 Riikka L. Puurunen,15 Alexander Pyymaki Perros,2 Geert Rampelberg,9 Robin H. A. Ras,2 Erwan Rauwel,36 Fred Roozeboom,37 Timo Sajavaara,38 Hossein Salami,39 Hele Savin,2 Nathanaelle Schneider,40 Thomas E. Seidel,41 Pia Sundberg,2 Jonas Sundqvist,42 Dmitry Suyatin,42 Massimo Tallarida,43 Tobias Törndahl,44 Mikko Utriainen,15 J. Ruud van Ommen,45 Thomas Wächtler,46 Claudia Wiemer,47 Oili M. E. Ylivaara,15 Oksana Yurkevich48

1University of Tartu, Institute of Physics, Estonia; 2Aalto University, Espoo, Finland; 3Stanford University, Stanford, California, USA; 4CNRS University of Montpellier, Montpellier, France; 5Institute of Solid State Physics, Bulgarian Academy of Sciences, Sofia, Bulgaria; 6Masaryk University, Brno, Czech Republic; 7Oxford Instruments Analytical Oy, Espoo, Finland; 8Univ. Grenoble Alpes, CNRS, SIMaP, F-38000 Grenoble, France; 9Ghent University, Ghent, Belgium; 10Inorganic Materials Chemistry, Ruhr University Bochum, Germany; 11St. Petersburg State University, St. Petersburg, Russia; 12Tyndall National Institute, University College Cork, Lee Maltings, Cork, Ireland; 13Institute for Theoretical and Experimental Physics, Moscow, Russia; 14Fondazione Bruno Kessler, Center for Materials and Microsystems, Trento, Italy; 15VTT Technical Research Centre of Finland, Espoo, Finland; 16LAM Research Corporation, Tualatin, Oregon, USA; 17Seoul National University, Seoul, Korea; 18Technische Universität Dresden, Dresden, Germany; 19USA; 20St. Petersburg Electrotechnical University “LETI”, St. Petersburg, Russia; 21Massachusetts Institute of Technology, Cambridge, Massachusetts, USA; 22Techinsights, Ottawa, Canada; 23Ioffe Institute, St. Petersburg, Russia; 24SENTECH Instruments GmbH, Berlin, Germany; 25University of Colorado Boulder, Colorado, USA; 26STMicroelectronics, Agrate Brianza, Italy; 27Seagate Technology, Derry, Northern Ireland (UK); 28University of Helsinki, Helsinki, Finland; 29St. Petersburg State Technological Institute (Technical University), St. Petersburg, Russia; 30Technische Universität Chemnitz, Chemnitz, Germany; 31Military University of Technology, Warsaw, Poland; 32ASELSAN Inc. - Microelectronics, Guidance and Electro-Optics Business Sector, Ankara, Turkey; 33Linköping University, Linköping, Sweden; 34The University of Texas at Dallas, Texas, USA; 35Altatech, Montbonnot, France; 36Tallinn University of Technology, Tartu College, Tartu, Estonia; 37Eindhoven University of Technology, Eindhoven, and TNO, Eindhoven, The Netherlands; 38University of Jyväskylä, Jyväskylä, Finland; 39University of Maryland, College Park, Maryland, USA; 40IRDEP / CNRS, IPVF, Chatou, France; 41Seitek50, Palm Coast, Florida, USA; 42Lund University, Lund, Sweden; 43ALBA Synchrotron Light Source, Barcelona, Spain; 44Uppsala University, Uppsala, Sweden; 45Delft University of Technology, Delft, the Netherlands; 46Fraunhofer ENAS & TU Chemnitz, Chemnitz, Germany; 47Laboratorio MDM, IMM-CNR, Agrate Brianza, Italy; 48Immanuel Kant Baltic Federal University, Kaliningrad, Russia

For abstract text, see:

Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust

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