VPHA communication: JVSTA article with minor revision submitted 9.11.2016

The email below was sent to 76 VPHA contributors. (Email sent 9.11. Nashville time, while the time log shows the Finnish time and accordingly shows date as 10.11.)

From: Puurunen Riikka
Sent: 10. marraskuuta 2016 4:46
To: info@ vph-ald.com
Cc: Puurunen Riikka; Sundqvist Jonas
Subject: VPHA JVSTA article with minor revision submitted

Dear VPHA contributors,

We have yesterday received positive referee/editor comments regarding our manuscript “Recommended reading list of early publications on Atomic Layer Deposition-outcome of the Virtual Project on the History of ALD”. You can read the referee comments in full below.

The editor’s decision was that (very) minor revision is needed. The need for revision being so small, we have created and I have a moment ago submitted a revised version (revision: a few missing spaces added).

Please find attached the cover letter and the revised version of the manuscript, as well as a manuscript with changes made shown.

With best regards,

Greetings from the AVS 63 symposium, Nashville, Tennessee,

Riikka Puurunen, VPHA coordinator

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Riikka Puurunen (Dr.), Senior Scientist, Microsystems and Nanoelectronics; Project Manager (IPMA C)

VTT Technical Research Centre of Finland, Tietotie 3, Espoo (P.O. Box 1000), FI-02044 Espoo (VTT), Finland

<email removed>, tel. <removed>, www.vttresearch.com, www.aldcoe.fi

fi.linkedin.com/in/riikkapuurunen, vph-ald.com, aldhistory.blogspot.fi, twitter.com/rlpuu

From: JVST
Sent: 8. marraskuuta 2016 19:22
To: Puurunen Riikka
Subject: ALD16JVSTA-RA-16-381 Editor's Decision - MINOR Revisions

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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust