VPHA communication: JVSTA article accepted for publication

The email below was sent to 76 VPHA co-authors and 39 prospective co-authors.

From: Puurunen Riikka
Sent: 16. marraskuuta 2016 14:36
To: info@ vph-ald.com
Cc: Puurunen Riikka; Sundqvist Jonas
Subject: VPHA's JVSTA article accepted for publication

Dear VPHA co-authors and prospective co-authors,

It is my pleasure to inform you that our article “Recommended reading list of early publications on Atomic Layer Deposition-outcome of the Virtual Project on the History of ALD”, has been accepted for publication in Journal of Vacuum Science and Technology A (see the JVSTA’s editor-in-chief’s email below). The article was written expanding on the contents of VPHA’s poster at the ALD 2016 conference (travel report here). Attached is the final accepted version for everyone’s reference.

The article will appear in the special issue on ALD, formally scheduled for January 2017. I will inform you once the article has been published online. Knowing how fast JVSTA is, I would expect online publication to take place within two weeks or so.

The manuscript has more co-authors (62) than scientific articles usually do; more about co-author selection is described here: http://aldhistory.blogspot.fi/2016/09/vpha-jvsta-manuscript-expanded-author-list.html. Thank you all co-authors for help with the manuscript preparation. Thank also you for those VPHA contributors who chose not to co-author this JVSTA article but who have provided personal comments on early ALD works in the ALD-history-evolving-file. It is these personal comments that form the core of the VPHA ALD history activities.

Then, a brief note on the future. According to the info in the VPHA-reading-overview-file, the reading-commenting work is currently 75.8% completed, so there is still a non-negligible amount of reading work to do. Currently, the reading-commenting work proceeds as described in the VPHA-reading-workflow file. VPHA is still open for more volunteers to join. If you have colleagues who are interested, please ask them to inform us at info@ vph-ald.com of their interest.

Best regards,

Riikka Puurunen, VPHA coordinator

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Riikka Puurunen (Dr.), Senior Scientist, Microsystems and Nanoelectronics; Project Manager (IPMA C)

VTT Technical Research Centre of Finland, Tietotie 3, Espoo (P.O. Box 1000), FI-02044 Espoo (VTT), Finland

<email removed>, <tel removed>, www.vttresearch.com, www.aldcoe.fi

fi.linkedin.com/in/riikkapuurunen, vph-ald.com, aldhistory.blogspot.fi, twitter.com/rlpuu

From: JVST
Sent: 15. marraskuuta 2016 22:51
To: Puurunen Riikka
Subject: JVST A paper status for manuscript # ALD16JVSTA-RA-16-381R

<email removed>