Forty years after filing the first patent, on the same day in 2014, the Finnish Centre of Excellence in Atomic Layer Deposition (ALDCoE) released the FinALD40 exhibition material. The material is still accessible through the aldcoe.fi and vph-ald.com websites.
Two years later, again on the same day, VTT launched a new website: http://pillarhall.com. This website is related to the microscopic lateral high-aspect-ratio (LHAR) thin film conformality test structure developed at VTT, also known as "PillarHall" (protected trademark). The original ideas that have resulted in the PillarHall test structures have been created by VTT'ers in the ALDCoE project funded by the Academy of Finland and has already resulted in two scientific publications (details in pillarhall.com). The research and development work continues with the University of Helsinki ALD group and many other groups worldwide, as well as in a dedicated "TUTL" project funded by Tekes - the Finnish Funding Agency for Innovation.
"What you can't measure, you can't improve". If you are interested in VTT's conformality test structures, please have a look and find the appropriate contact information at the website http://pillarhall.com.
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| Diced 150 mm silicon wafer with PillarHallTM conformality test chip prototypes. Photo: Riikka Puurunen, VTT, November 16, 2016. |
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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust
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