Among other things, we discussed the VPHA ALD history activities. One thing that I learned from the Pakkanens is that in the early 1990s, an ALD conference has been organized in Joensuu, Finland, called ACSI-2. This conference was missing from the VPHA-ALD-conference-list and has since then been added. The full conference name was "Second International Symposium on Atomically Controlled Surfaces and Interfaces". Proceedings were published in Applied Surface Science 75 (1994) 1-363. As this was "ACSI-2", it is obvious that an "ACSI-1" and probably at least "ACSI-3" (and maybe more?) has been organized.
|Tuomo Suntola and Riikka Puurunen at Micronova, Espoo, Finland, November 25, 2016. Photo by Mikko Utriainen.|
We would of course like to complete the ALD conference list with information from the ACSI conference series, too. If you have or can find information on the "ACSI-1", "ACSI-3" or other conferences of the series, please let us know at info@ vph-ald.com.
Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust
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