Monday 19 December 2016

VPHA status update 19.12.2016

The email below was sent to 76 VPHA co-authors and 40 prospective co-authors. 

From: Puurunen Riikka
Sent: 19. joulukuuta 2016 9:23
To: info@
Cc: Puurunen Riikka; Sundqvist Jonas
Subject: VPHA status update 19.12.2016

Dear VPHA co-authors and prospective co-authors,

With this general status update, I would like to inform you of the publication of the VPHA review article in JVSTA and update on other recent progress. The previous update was sent on October 30, 2016. Please read more below on the following topics:

1. VPHA JVSTA review published
2. VPHA reading status
3. VPHA's lists on reviews, conferences and theses to be completed
4. Translation of some Molecular Layering papers?
5. Other posts in the ALD History Blog

Wishing everyone happy holidays and the best of luck for the coming year,
Riikka Puurunen, VPHA coordinator

Riikka Puurunen (Dr.), Senior Scientist, Microsystems and Nanoelectronics; Project Manager (IPMA C)
VTT Technical Research Centre of Finland, Tietotie 3, Espoo (P.O. Box 1000), FI-02044 Espoo (VTT), Finland

1 VPHA JVSTA review published

I am happy to tell that the first general joint article from VPHA has been published in the special ALD issue in the Journal of Vacuum Science and Technology A.

Title: Review Article: Recommended reading list of early publications on atomic layer deposition—Outcome of the "Virtual Project on the History of ALD"
Authors (62 in total, alphabetical order): Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael Bechelany, Maria Berdova, Stefan Boyadjiev, David C. Cameron, Rong Chen, Mikhail Chubarov, Veronique Cremers, Anjana Devi, Viktor Drozd, Liliya Elnikova, Gloria Gottardi, Kestutis Grigoras, Dennis M. Hausmann, Cheol Seong Hwang, Shih-Hui Jen, Tanja Kallio, Jaana Kanervo, Ivan Khmelnitskiy, Do Han Kim, Lev Klibanov, Yury Koshtyal, A. Outi I. Krause, Jakob Kuhs, Irina Kärkkänen, Marja-Leena Kääriäinen, Tommi Kääriäinen, Luca Lamagna, Adam A. Łapicki, Markku Leskelä, Harri Lipsanen, Jussi Lyytinen, Anatoly Malkov, Anatoly Malygin, Abdelkader Mennad, Christian Militzer, Jyrki Molarius, Małgorzata Norek, Çağla Özgit-Akgün, Mikhail Panov, Henrik Pedersen, Fabien Piallat, Georgi Popov, Riikka L. Puurunen, Geert Rampelberg, Robin H. A. Ras, Erwan Rauwel, Fred Roozeboom, Timo Sajavaara, Hossein Salami, Hele Savin, Nathanaelle Schneider, Thomas E. Seidel, Jonas Sundqvist, Dmitry B. Suyatin, Tobias Törndahl, J. Ruud van Ommen, Claudia Wiemer, Oili M. E. Ylivaara, Oksana Yurkevich
Citation: Journal of Vacuum Science and Technology A 35 (2017) 010801 (13 pages).

A post in the ALD History Blog describes the publication. The usual practice of JVSTA would have been to shorten the author list to "et al." from a certain number of author and NOT include the titles; we are grateful for the JVSTA editors for making exceptions and allowing us to expand the article for a complete historical record (you can find our article correspondence here).

Thank you to all who made it possible to write this article in such a short timeframe: gave comments in the ALD-history-evolving-file, helped in writing the first manuscript draft, helped with perfecting the article, checked the last details, double-checked the proofs. The article is published with Open Access (license: CC BY 4.0) and can be freely shared and used, e.g. in teaching.

The following posts have been published in the ALD History Blog regarding this JVSTA article since the previous update:

2 VPHA reading status

The VPHA reading is 76.4% completed as of December 18, 2016. Recently, lists were created and published in the ALD History Blog of the publications which still need comments - see the links below. The lists contain publications in Bulgarian, English, Finnish, German, Japanese, and Russian. The largest work to do remains with the Russian publications. Everyone can keep on reading and commenting, following the procedure described in the VPHA-reading-workflow.

3 VPHA's lists on reviews, conferences and theses to be completed

In VPHA, we have been creating valuable worldwide lists of ALD conferences, ALD theses (PhD-equivalent and higher), and ALD reviews. The VPHA early ALD history reading has had a clear end year of 1986. For the VPHA lists, we have decided to complete the lists for the situation at the end of year 2016. Feedback on missing items can be given all the time, please use the xxx-to-be-added files for entering information.
*VPHA-ALD-thesis-list, link, VPHA-thesis-to-be-added.
*VPHA-ALD-reviews, link, VPHA-reviews-to-be-added
*VPHA-ALD-conference-list,  link , VPHA-conference-to-be-added

4 Translation of some Molecular Layering papers?

It seems possible that the publisher of the VPHA review paper will be interested in getting some of the early works on Molecular Layering translated from Russian to English, to make the publications more accessible to the general scientific audience. Especially journal articles not translated earlier, will be interesting.

Regarding this, there will be two action points:
*I have promised to create a list of early ALD publications not available (to our knowledge) in English, showing the category (conference abstract, journal, book, patent, ...) and our information on the languages in which the publication is available. The category notations are not yet available; when I know how and where to create them, I will be contacting the VPHA group for volunteers to help with the work of adding the category to note to the 366 publications.
*The journal is looking for people who would be willing to translate texts from Russian to English. If you think you have suitable language skills and are interested in making a translation, please let us know at info@ We will communicate the VPHA info collectively to the Editor. Or, you can like to proceed faster, you can contact the Editor-in-Chief directly, you find the info at:

Related ALD History Blog post:

5 Other posts in the ALD History Blog

Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust

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