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Espoo, Finland, September 30, 2016
Dear Editor
of JVSTA,
Please find
enclosed a manuscript entitled ”Recommended reading list of early publications
on Atomic Layer Deposition—outcome of the Virtual Project on the History of
ALD” by Ahvenniemi et al. (in total 62 co-authors).
The
manuscript deals with the history of ALD, extending the information shared on
early ALD works in a poster presentation at the ALD 2016 conference, Ireland
this summer. The manuscript is quite unusual in its contents and its long
alphabetical author list. The author list is a result of the large,
collaborative project in which the work has been made. While we have had no formal request to write
this manuscript for JVSTA, informally we have been invited to do so by Prof.
Gregory Parsons.
Many
early ALD works have been published in Russian, and official English
translations of the articles exist in some cases. In an earlier history review
in JVSTA, either the Russian or the English original has been referred to (see,
e.g., http://dx.doi.org/10.1116/1.4816548). We propose --- as has been done
in an earlier review (see http://dx.doi.org/10.1063/1.1940727) --- to refer to them both in the
same citation: first the original, then, in parentheses, the translation. For
improved readability and long-term significance, we have also provided the
titles of all works in the reference list; titles have been translated into
English by the VPHA group, when necessary. Although reference titles are not normally
published in JVSTA articles, we ask that, in this case, the Editors allow the
titles to be published along with the references because of the nature of the
paper.
The
manuscript is new and is not being considered for publication elsewhere. Please
consider the manuscript for publication in the Journal of Vacuum Science and Technology A, preferably the special
ALD issue, if still possible. We leave it to the editors to decide whether this
should be published as an Article, a Critical Review or as some other form of
publication.
On the behalf of all co-authors
Riikka
Puurunen, corresponding author, VPHA voluntary coordinator
Riikka Puurunen (Dr.), Senior
Scientist, Microsystems and Nanoelectronics; Project Manager (IPMA C)
VTT
Technical Research Centre of Finland, Tietotie 3, Espoo (P.O. Box 1000),
FI-02044 Espoo (VTT), Finland
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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust
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