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Espoo, Finland, September 30, 2016
Dear Editor of JVSTA,
Please find enclosed a manuscript entitled ”Recommended reading list of early publications on Atomic Layer Deposition—outcome of the Virtual Project on the History of ALD” by Ahvenniemi et al. (in total 62 co-authors).
The manuscript deals with the history of ALD, extending the information shared on early ALD works in a poster presentation at the ALD 2016 conference, Ireland this summer. The manuscript is quite unusual in its contents and its long alphabetical author list. The author list is a result of the large, collaborative project in which the work has been made. While we have had no formal request to write this manuscript for JVSTA, informally we have been invited to do so by Prof. Gregory Parsons.
Many early ALD works have been published in Russian, and official English translations of the articles exist in some cases. In an earlier history review in JVSTA, either the Russian or the English original has been referred to (see, e.g., http://dx.doi.org/10.1116/1.4816548). We propose --- as has been done in an earlier review (see http://dx.doi.org/10.1063/1.1940727--- to refer to them both in the same citation: first the original, then, in parentheses, the translation. For improved readability and long-term significance, we have also provided the titles of all works in the reference list; titles have been translated into English by the VPHA group, when necessary. Although reference titles are not normally published in JVSTA articles, we ask that, in this case, the Editors allow the titles to be published along with the references because of the nature of the paper.
The manuscript is new and is not being considered for publication elsewhere. Please consider the manuscript for publication in the Journal of Vacuum Science and Technology A, preferably the special ALD issue, if still possible. We leave it to the editors to decide whether this should be published as an Article, a Critical Review or as some other form of publication.
On the behalf of all co-authors
Riikka Puurunen, corresponding author, VPHA voluntary coordinator
Riikka Puurunen (Dr.), Senior Scientist, Microsystems and Nanoelectronics; Project Manager (IPMA C)
VTT Technical Research Centre of Finland, Tietotie 3, Espoo (P.O. Box 1000), FI-02044 Espoo (VTT), Finland
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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust