Sunday 9 October 2016

VPHA communication: Baltic ALD 2016 presentation & travel report

The email below was sent to 73 VPHA co-authors and 38 prospective co-authors.  

From: Puurunen Riikka
Sent: 9. lokakuuta 2016 12:03
To: info@ <space added>
Cc: Puurunen Riikka; Sundqvist Jonas
Subject: VPHA: Baltic ALD 2016 presentation & travel report

Dear VPHA co-authors and prospective co-authors,

Last week, the 14th International Baltic Conference on Atomic Layer Deposition was organized in St. Petersburg, Russia ( Similarly as for some earlier ALD conferences, I wrote a travel report from the conference: The earlier travel reports (and this one, too) you find from this link.   

I had the honour to give the first invited talk of the Baltic ALD 2016 conference. This is - of course - thanks to the Virtual Project on the History of ALD (VPHA), which we have been collectively working on since July 2013. Link to the VPHA presentation slides: Additionally, I had a presentation about conformality investigations of ALD thin films with recently-developed microscopic lateral high-aspect-ratio (LHAR) test structures (more info here and here).

There are many people in the ALD community who are potentially interested in the contents of the presentation, but who were not present at the Baltic ALD conference. Therefore, the aim was to record presentation - unfortunately, only the first 18 min of it actually got recorded; about 10 min are missing. I had a second chance to record the presentation while visiting Prof Malygin’s lab on Wednesday, when I gave the same presentation again. The result (recorded with PowerPoint) is as such available for everyone’s reference. If some of the recipients of this email know how to make a movie out of a recorded pptx file (with audio included), feel free to make the conversion and send it back to me as a movie file. Links to the two records:

The next steps in VPHA are that (1) the reading-commenting work continues as usual (with a few new volunteers from BALD 2016 - welcome!) and (2) we are waiting for feedback from JVSTA regarding the submitted manuscript.

Best regards,
Thank you to everyone for collaboration and interest,
Riikka Puurunen, VPHA coordinator
Riikka Puurunen (Dr.), Senior Scientist, Microsystems and Nanoelectronics; Project Manager (IPMA C)
VTT Technical Research Centre of Finland, Tietotie 3, Espoo (P.O. Box 1000), FI-02044 Espoo (VTT), Finland

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