VPHA communication: JVSTA manuscript to be submitted today

The email below was sent to 73 VPHA co-authors, before submitting the manuscript to the journal (in the meantime, it has been submitted). Of the VPHA co-authors, 62 chose to be co-authors of the current manuscript and 11 chose to be thanked in the Acknowledgements.   

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From: Puurunen Riikka
Sent: 30. syyskuuta 2016 9:34
To: info@ vph-ald.com <space added>
Cc: Puurunen Riikka; Sundqvist Jonas <email changed to name>
Subject: VPHA JVSTA manuscript to be submitted today

Dear VPHA co-authors,

VPHA’s first joint journal article manuscript has now been finalized and I am about to submit it to the Journal of Vacuum Science and Technology A (JVSTA). Thank you for all who gave comments in the final check (DL 29.9.). Several minor improvements were still made in this last revision round.

Attached to this email as pdf you find (1) the final to-be-submitted manuscript, (2) changes made since the previous version of 27.9. (generated with automated “track changes” function), and (3) Letter to the Editor (current draft).

Our hope is that the article could still be published in the special ALD issue of January 2017 (formally, we are late of the deadline).

Best regards,

Thanking everyone of efficient collaboration,

Riikka Puurunen, VPHA coordinator

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Riikka Puurunen (Dr.), Senior Scientist, Microsystems and Nanoelectronics; Project Manager (IPMA C)

VTT Technical Research Centre of Finland, Tietotie 3, Espoo (P.O. Box 1000), FI-02044 Espoo (VTT), Finland

<email and telephone no. removed>, www.vttresearch.com, www.aldcoe.fi

fi.linkedin.com/in/riikkapuurunen, vph-ald.com, aldhistory.blogspot.fi, twitter.com/rlpuu