- Riikka L. Puurunen, VTT Research Centre of Finland Ltd, Espoo, Finland
- Erwin Kessels, Department of Applied Physics, Eindhoven University of Technology,
- Mikko Ritala, Department of Chemistry, University of Helsinki, Finland
- Tobias Törndahl, Solid State Electronics, Uppsala University, Sweden
- Emma Salmi, Beneq Oy, Finland
- Viktor Drozd, Saint Petersburg State University, Russia
- Viktor Luchinin, St Petersburg Electrotechnical University ”LETI”, Russia
- Andrey Markeev, Moscow Institute of Physics and Technology, Russia
|Screen capture from the conference website http://www.bald2016.ru/.|
My invited talk---abstract here---is likely to be the last organizational presentation from VPHA.
It will be a pleasure to visit St Petersburg again.
Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust