Sunday 18 September 2016

Baltic ALD 2016 St. Petersburg invited speaker list

The invited speaker list of Baltic ALD 2016 in St. Petersburg has been updated and is as follows (titles of the talks at the conference website
  • Riikka L. Puurunen, VTT Research Centre of Finland Ltd, Espoo, Finland
  • Erwin Kessels, Department of Applied Physics, Eindhoven University of Technology,
  • Mikko Ritala, Department of Chemistry, University of Helsinki, Finland
  • Tobias Törndahl, Solid State Electronics, Uppsala University, Sweden
  • Emma Salmi, Beneq Oy, Finland
  • Viktor Drozd, Saint Petersburg State University, Russia
  • Viktor Luchinin, St Petersburg Electrotechnical University ”LETI”, Russia
  • Andrey Markeev, Moscow Institute of Physics and Technology, Russia
Screen capture from the conference website
My invited talk---abstract here---is likely to be the last organizational presentation from VPHA.

I will have another presentation, too, on measuring the conformality of ALD films in very demanding test structures developed at VTT which we call "PillarHall" , with aspect ratio (AR) up to 10 000 : 1 and beyond. The work continues on our publication in JVSTA, 2015,, open access link here.

It will be a pleasure to visit St Petersburg again.

Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust

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