One of the action items in the Virtual Project on the History of ALD (VPHA) is to update the Wikipedia Atomic Layer Deposition section https://en.wikipedia.org/wiki/Atomic_layer_deposition, what comes to the history description (see Publication Plan).
Today, a minor important modification was made, as the "ALE Essay" was added to the reference list to the following statement. Before today, this same statement was there, but without any reference to further sources.
"It was the work of Dr Tuomo Suntola and coworkers in Finland in mid-1970s that made the scientific idea a true thin film deposition technology and took that into an industrial use and worldwide awareness. "
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