Saturday 31 October 2015

VPHA status update email 2015-10-31

This email was sent on 31.10.2015 to all VPHA co-authors (38) and registered prospective co-authors (26). 

Would you would like to join the VPHA as a volunteer and as a prospective co-author receive these emails, please send an email to info@


Dear VPHA co-authors and prospective co-authors,

Progress has taken place in VPHA during the one and the half weeks regarding many aspects. Please find info below regarding:
  1. Update to the VPHA Introduction and Invitation to participate;
  2. Update to the ALD-history-evolving-file, including TOC addition
  3. New open file created: VPHA-translations;
  4. Small update made to Wikipedia;
  5. VPHA ALD History blog.

Best regards,
Riikka, the voluntary VPHA coordinator
Riikka Puurunen (Dr.), Senior Scientist, Microsystems and Nanoelectronics; Project Manager (IPMA C)
VTT Technical Research Centre of Finland, Tietotie 3, Espoo (P.O. Box 1000), FI-02044 Espoo (VTT), Finland

1) Update to the VPHA Introduction and Invitation to participate  

Please find the updated Introduction and Invitation to participate here: The old version, from in July 2013, is included at the end of the file.

The updated version is dated October 25, 2015, and it is signed by Riikka Puurunen (VTT, Finland), Yury Koshtyal (Ioffe Institute, Russia), Henrik Pedersen (Linköping University, Sweden), Ruud Van Ommen (Delft University of Technology, The Netherlands), and Jonas Sundqvist (Technische Universität Dresden, Germany; Lund University, Sweden).

2) Update to ALD-history-evolving-file, including TOC addition

The ALD-history-evolving-file has been updated, mainly to accommodate the Update to the Introduction. At the same time, a Table of Contents (TOC) was added to the very beginning of the file. This will make it easier to navigate in this large file.  

Another way to navigate is, of course, the search function. With this, one can easily locate a particular reference, once you know the author or, even better, the unique code of the reference as is used in the VPHA - e.g. {Aleskovskii1974} or {Suntola1985}.

3) New open file created: VPHA-translations

A new open Google docs file has been created for VPHA: “VPHA-translations”. All translations of early ALD works made by VPHA participants will be collected in this file. You can find a link to it at

Currently, it contains translations of parts of the thesis of Aleskovskii and parts of the thesis by Drozd. Thank you to Maria Berdova, Fred Roozeboom and Victor Drozd for the current translations and for the permission to share them in this file.   

The VPHA-translations file can be viewed by everyone in real time. Individual commenting/editing permissions can be granted upon request.  

4) Small update to Wikipedia

One of the action items in the Virtual Project on the History of ALD (VPHA) is to update the Wikipedia Atomic Layer Deposition history description (see Publication Plan).

A small important modification was recently made, as the "ALE Essay" was added to the reference list to the following statement. (Thanks to Jonas Sundqvist for taking care of this.) The text reads currently as follows. Before the edit, this same statement was there, without any reference to further source of information.

"It was the work of Dr Tuomo Suntola and coworkers in Finland in mid-1970s that made the scientific idea a true thin film deposition technology and took that into an industrial use and worldwide awareness.[4] "

Ref 4: Riikka L. Puurunen, A Short History of Atomic Layer Deposition: Tuomo Suntola’s Atomic Layer Epitaxy, Chemical Vapor Deposition, 2014, Vol 20, Issue 10-11-12, pages 332-344,

5) VPHA ALD History blog

A blog has been created to accompany the VPHA website and the LinkedIn ALD History group. You can find the blog at There is also a link to the blog at the left-side quick launch bar in   

The blog idea is new, and how it will be used, will probably evolve with time. There are many advantages of having the blog, among others, easiness of writing, sharing, and archiving. The balance between emails-LinkedIn-VPHAblog is still to be seen, all three methods of updating will in any case continue.

About the use of the blog:
  • Expect to get updates on the status and progress of VPHA
  • The will also be posts regarding past events (VPHA started in 2013) and the general background of the VPHA ALD history project
  • There can be guest posts, too
  • You can order new posts by email for easy following
  • The label cloud, blog archive and search function help one to navigate and find relevant posts

Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust

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