- Essay by A. A. Malygin, V. E. Drozd, A. A. Malkov, V. M. Smirnov, "From V. B. Aleskovskii’s "Framework" Hypothesis to the Method of Molecular Layering/Atomic Layer Deposition", Chemical Vapor Deposition, in press (2015).
- Essay by R. L. Puurunen, "A short history of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy", Chemical Vapor Deposition 20 (2014) 332-344, doi: 10.1002/cvde.201402012. Open Access. Full essay.
While waiting for the ML essay to be published, we can already access some materials related to Molecular Layering through recent presentations of two authors of the essay, Prof. Anatoly Malygin and Prof. Victor Drozd.
Both Malygin and Drozd --- who both are key Molecular Layering scientists and who have worked with ML-ALD throughout their careers --- have given invited presentations at recent international conferences and kindly allowed their presentations slides to be uploaded to the website of the Virtual Project on the History of ALD (VPHA), http://vph-ald.com. Please find the ML presentation details and links below, as well as examples of the slides.
- Invited talk by V. E. Drozd "ML-ALD seeks its niche in education, science and application", 12th International Baltic Conference on Atomic Layer Deposition, May 12-13, 2014, Helsinki, Finland. http://vph-ald.com/UploadedPublications/BALD_Drozd_28Oct2014.pdf
- Invited talk by A. A. Malygin, "The origins of ML-ALD in the USSR-Russia: from V. B. Aleskovskiiיs “framework hypothesis” on the path to precise synthesis of solids", International workshop Atomic Layer Deposition Russia 2015, 21-23 September, 2015, Moscow-Dolgoprudny, Russia. http://vph-ald.com/UploadedPublications/ALDRussia-2015_Malygin_invited.pdf
|A slide from Prof Drozd's presentation at the Baltic ALD conference in Helsinki, May 2014, showing how Koltsov presented the growth of TiO2 from titanium tetrachloride and water by ALD.|
|A slide from Prof Malygin's presentation at the ALD Russia workshop in Moscow-Dolgoprudny, September 2015, showing a scheme with various variants Molecular Layering reactions, from the doctor of science dissertation by Koltsov, 1971.|