Saturday, 28 November 2015

Molecular Layering (ML) presentations at VPHA website

An essay is soon to be published of the "Molecular Layering (ML) branch" of Atomic Layer Deposition (ALD) in the Chemical Vapor Deposition (CVD) journal:

  • Essay by A. A. Malygin, V. E. Drozd, A. A. Malkov, V. M. Smirnov, "From V. B. Aleskovskii’s "Framework" Hypothesis to the Method of Molecular Layering/Atomic Layer Deposition", Chemical Vapor Deposition, in press (2015).
This essay will very nicely complement an earlier ALD history essay in the CVD journal, which I (Riikka Puurunen) wrote in close collaboration with the Finnish inventor of ALD Dr. Tuomo Suntola on the "Atomic Layer Epitaxy (ALE)" branch of ALD in 2014. 

  • Essay by R. L. Puurunen, "A short history of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy", Chemical Vapor Deposition 20 (2014) 332-344, doi: 10.1002/cvde.201402012. Open Access. Full essay.

While waiting for the ML essay to be published, we can already access some materials related to Molecular Layering through recent presentations of two authors of the essay, Prof. Anatoly Malygin and Prof. Victor Drozd.
Both Malygin and Drozd --- who both are key Molecular Layering scientists and who have worked with ML-ALD throughout their careers --- have given invited presentations at recent international conferences and kindly allowed their presentations slides to be uploaded to the website of the Virtual Project on the History of ALD (VPHA), http://vph-ald.com. Please find the ML presentation details and links below, as well as examples of the slides. 




    A slide from Prof Drozd's presentation at the Baltic ALD conference in Helsinki, May 2014, showing how Koltsov presented the growth of TiO2 from titanium tetrachloride and water by ALD. 


    A slide from Prof Malygin's presentation at the ALD Russia workshop in Moscow-Dolgoprudny, September 2015, showing a scheme with various variants Molecular Layering reactions, from the doctor of science dissertation by Koltsov, 1971.


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