Dear VPHA co-authors and prospective co-authors,
This email is not related to VPHA but to lateral high-aspect-ratio test structures created to analyse the conformality of films made by ALD and other methods. I hope that you do not mind receiving this “off-topic” message sent to all VPHA participants.
Some of you know that I have been recently working on the topic of conformality analysis of ALD films. Currently, we continue to work on it at VTT in a project funded by Finnish Funding Agency for Innovation. The recipient list has many people knowledgeable of the subject.
Related to the on-going project, we are making a small survey related to conformality analysis. I would appreciate if at least some of the VPHA participants could answer the survey. Answering should not take more than 10 min of your time.
* A SlideShare presentation introduces the topic: http://www.slideshare.net/RiikkaPuurunen/pillarhall-basic-concept-slideshare.
* Link to survey is <link removed>.
* Survey is open until Sunday March 19.
* There is an option to leave your contact information, would you be interested in receiving more information in the future.
Then a note about VPHA. There are quite some updates in ALD History Blog http://aldhistory.blogspot.fi, which may be interesting to look at if you did not see them yet. A summarizing status update should be coming in the next weeks.
P.S. If you have received an invitation to answer the survey through some other channel and answered, please ignore this message.
Riikka Puurunen (Dr.), Senior Scientist, Microsystems and Nanoelectronics; Project Manager (IPMA C)
VTT Technical Research Centre of Finland, Tietotie 3, Espoo (P.O. Box 1000), FI-02044 Espoo (VTT), Finland
Part-time at VTT Feb-Jul 2017: Mon, Tue at VTT; Wed-Thu-Fri at Aalto University (<tel removed>)