Beneq Blog on the history of ALD-based electroluminescent displays

Beneq has published a blog post where they very nicely review the history of electoluminescent (EL) flat panel display fabrication. EL flat panel displays were the first large-scale industrial application of ALD; production started in the 1980s and still continues in Olarinluoma, Espoo, Finland. Some process details are also shared in the blog post. At the end of the post, one can request a copy of the interesting presentation of Sami Sneck at the ALD 2016 conference.

Link to Beneq blog: http://beneq.com/blog/201608/ald-in-extreme-conditions.html

More on the topic:

• "A Short History of Atomic Layer Deposition: Tuomo Suntola's Atomic Layer Epitaxy" by R. L. Puurunen, Chemical Vapor Deposition, Vol 20, Year 2014, pages 332-344. http://onlinelibrary.wiley.com/doi/10.1002/cvde.201402012/abstract  (open access)

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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust