Copies of communications to earlier ALD history review authors

Copies below of recent emails to authors of the JVSTA 2013 ALD history review informing of the progress of the Virtual Project on the History of ALD.

-------- Alkuperäinen viesti --------
Aihe: RE: Article on the history of ALD: recommended reading list of early publications
Lähettäjä: Puurunen Riikka
Vastaanottaja: <10 authors>
Kopio: info@ vph-ald.com

Dear authors of JVSTA 31 (2013) 050818, http://dx.doi.org/10.1116/1.4816548,

I have written a blog post to describe the ALD history activities preceding the Virtual Project on the History of ALD. Maybe you can find it interesting. Your JVSTA 2013 review is briefly mentioned, under section “2013, the AVS ALD history article and VPHA”.

Link to post: http://aldhistory.blogspot.fi/2017/02/on-earlier-ald-history-activities.html

Best regards,

Riikka Puurunen, VPHA voluntary coordinator

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Riikka Puurunen (Dr.), Senior Scientist, Microsystems and Nanoelectronics; Project Manager (IPMA C)

VTT Technical Research Centre of Finland, Tietotie 3, Espoo (P.O. Box 1000), FI-02044 Espoo (VTT), Finland

< removed >, tel. < removed >, www.vttresearch.com, www.aldcoe.fi, www.pillarhall.com

fi.linkedin.com/in/riikkapuurunen, vph-ald.com, aldhistory.blogspot.fi, twitter.com/rlpuu

Part-time at VTT Feb-Jul 2017: Mon, Tue at VTT; Wed-Thu-Fri at Aalto University (< removed >)

From: Puurunen Riikka [mailto:<removed>]
Sent: 10. tammikuuta 2017 14:16
To: <10 authors>
Cc: info@ vph-ald.com
Subject: Article on the history of ALD: recommended reading list of early publications

Dear authors of JVSTA 31 (2013) 050818,

Please find below information of a recent review article on the history of ALD, which you may find interesting.

·         Title: Recommended reading list of early publications on atomic layer deposition—Outcome of the “Virtual Project on the History of ALD”

·         Authors: 62 in total, alphabetical order

·         Citation: Journal of Vacuum Science and Technology A 35 (2017) 010801 (13 pages).

·         Link: http://dx.doi.org/10.1116/1.4971389.

The article is an outcome of the Virtual Project on the History of ALD (VPHA), carried out in atmosphere of Openness, Respect and Trust; project website http://vph.ald.com. Communications regarding this article can be viewed in the ALD History Blog which accompanies the project website, http://aldhistory.blogspot.fi/search/label/JVSTA. The article has been published with CC BY 4.0 licence and can be freely viewed and shared.

Best regards,

Riikka Puurunen, VPHA voluntary coordinator

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Riikka Puurunen (Dr.), Senior Scientist, Microsystems and Nanoelectronics; Project Manager (IPMA C)

VTT Technical Research Centre of Finland, Tietotie 3, Espoo (P.O. Box 1000), FI-02044 Espoo (VTT), Finland

< >, tel. < >, www.vttresearch.com, www.aldcoe.fi, www.pillarhall.com

fi.linkedin.com/in/riikkapuurunen, vph-ald.com, aldhistory.blogspot.fi, twitter.com/rlpuu

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Virtual Project on the History of ALD (VPHA) - in atmosphere of Openness, Respect, and Trust